PROCESS COMPRISING WATER VAPOR FOR HAZE ELIMINATION AND RESIDUE REMOVAL
A method of treating a substrate comprises removing material from a substrate using a treatment protocol to provide a treated substrate followed by a rinsing step. In the rinsing step at least one stream comprising a rinsing fluid is introduced and water vapor is caused to collide with and atomize t...
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| creator | KAHAIAN, DON LAUERHAAS, JEFFREY, M |
| description | A method of treating a substrate comprises removing material from a substrate using a treatment protocol to provide a treated substrate followed by a rinsing step. In the rinsing step at least one stream comprising a rinsing fluid is introduced and water vapor is caused to collide with and atomize the rinsing fluid. The atomized rinsing fluid is caused to rinsingly contact the treated substrate.
L'invention concerne un procédé de traitement d'un substrat comprenant l'étape d'élimination d'un matériau d'un substrat en utilisant un protocole de traitement afin de fournir un substrat traité suivie d'une étape de rinçage. Dans l'étape de rinçage, au moins un écoulement comprenant un liquide de rinçage est introduit et de la vapeur d'eau est amenée à entrer en collision avec, et à atomiser, le liquide de rinçage. Le liquide de rinçage atomisé est amené à entrer en contact avec le substrat traité dans un but de rinçage. |
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L'invention concerne un procédé de traitement d'un substrat comprenant l'étape d'élimination d'un matériau d'un substrat en utilisant un protocole de traitement afin de fournir un substrat traité suivie d'une étape de rinçage. Dans l'étape de rinçage, au moins un écoulement comprenant un liquide de rinçage est introduit et de la vapeur d'eau est amenée à entrer en collision avec, et à atomiser, le liquide de rinçage. Le liquide de rinçage atomisé est amené à entrer en contact avec le substrat traité dans un but de rinçage.</description><language>eng ; fre</language><subject>CLEANING ; CLEANING IN GENERAL ; PERFORMING OPERATIONS ; PREVENTION OF FOULING IN GENERAL ; TRANSPORTING</subject><creationdate>2014</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20141113&DB=EPODOC&CC=WO&NR=2014182418A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76293</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20141113&DB=EPODOC&CC=WO&NR=2014182418A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KAHAIAN, DON</creatorcontrib><creatorcontrib>LAUERHAAS, JEFFREY, M</creatorcontrib><title>PROCESS COMPRISING WATER VAPOR FOR HAZE ELIMINATION AND RESIDUE REMOVAL</title><description>A method of treating a substrate comprises removing material from a substrate using a treatment protocol to provide a treated substrate followed by a rinsing step. In the rinsing step at least one stream comprising a rinsing fluid is introduced and water vapor is caused to collide with and atomize the rinsing fluid. The atomized rinsing fluid is caused to rinsingly contact the treated substrate.
L'invention concerne un procédé de traitement d'un substrat comprenant l'étape d'élimination d'un matériau d'un substrat en utilisant un protocole de traitement afin de fournir un substrat traité suivie d'une étape de rinçage. Dans l'étape de rinçage, au moins un écoulement comprenant un liquide de rinçage est introduit et de la vapeur d'eau est amenée à entrer en collision avec, et à atomiser, le liquide de rinçage. Le liquide de rinçage atomisé est amené à entrer en contact avec le substrat traité dans un but de rinçage.</description><subject>CLEANING</subject><subject>CLEANING IN GENERAL</subject><subject>PERFORMING OPERATIONS</subject><subject>PREVENTION OF FOULING IN GENERAL</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2014</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHAPCPJ3dg0OVnD29w0I8gz29HNXCHcMcQ1SCHMM8A9ScANiD8coVwVXH09fTz_HEE9_PwVHPxeFINdgT5dQVyDt6x_m6MPDwJqWmFOcyguluRmU3VxDnD10Uwvy41OLCxKTU_NSS-LD_Y0MDE0MLYyA2NHQmDhVAKQsLaM</recordid><startdate>20141113</startdate><enddate>20141113</enddate><creator>KAHAIAN, DON</creator><creator>LAUERHAAS, JEFFREY, M</creator><scope>EVB</scope></search><sort><creationdate>20141113</creationdate><title>PROCESS COMPRISING WATER VAPOR FOR HAZE ELIMINATION AND RESIDUE REMOVAL</title><author>KAHAIAN, DON ; LAUERHAAS, JEFFREY, M</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2014182418A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2014</creationdate><topic>CLEANING</topic><topic>CLEANING IN GENERAL</topic><topic>PERFORMING OPERATIONS</topic><topic>PREVENTION OF FOULING IN GENERAL</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KAHAIAN, DON</creatorcontrib><creatorcontrib>LAUERHAAS, JEFFREY, M</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KAHAIAN, DON</au><au>LAUERHAAS, JEFFREY, M</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PROCESS COMPRISING WATER VAPOR FOR HAZE ELIMINATION AND RESIDUE REMOVAL</title><date>2014-11-13</date><risdate>2014</risdate><abstract>A method of treating a substrate comprises removing material from a substrate using a treatment protocol to provide a treated substrate followed by a rinsing step. In the rinsing step at least one stream comprising a rinsing fluid is introduced and water vapor is caused to collide with and atomize the rinsing fluid. The atomized rinsing fluid is caused to rinsingly contact the treated substrate.
L'invention concerne un procédé de traitement d'un substrat comprenant l'étape d'élimination d'un matériau d'un substrat en utilisant un protocole de traitement afin de fournir un substrat traité suivie d'une étape de rinçage. Dans l'étape de rinçage, au moins un écoulement comprenant un liquide de rinçage est introduit et de la vapeur d'eau est amenée à entrer en collision avec, et à atomiser, le liquide de rinçage. Le liquide de rinçage atomisé est amené à entrer en contact avec le substrat traité dans un but de rinçage.</abstract><oa>free_for_read</oa></addata></record> |
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| language | eng ; fre |
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| subjects | CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING |
| title | PROCESS COMPRISING WATER VAPOR FOR HAZE ELIMINATION AND RESIDUE REMOVAL |
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