MICROVALVE DEVICE AND FLUID FLOW CONTROL METHOD

A microvalve device and fluid flow control method, the microvalve device comprising: a microvalve body, the microvalve body being composed of multiple layers and comprising a first layer (1) and a second layer (2) bonded with the first layer (1), the second layer (2) having a plurality of fluid port...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: DENG, NING, ZHANG, SHENGCHANG, CHEN, PEIYI, WANG, ZHEYAO, JIANG, TINGHOU
Format: Patent
Sprache:chi ; eng ; fre
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