MICROVALVE DEVICE AND FLUID FLOW CONTROL METHOD
A microvalve device and fluid flow control method, the microvalve device comprising: a microvalve body, the microvalve body being composed of multiple layers and comprising a first layer (1) and a second layer (2) bonded with the first layer (1), the second layer (2) having a plurality of fluid port...
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Format: | Patent |
Sprache: | chi ; eng ; fre |
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