STAMPER, IMPRINTING DEVICE AND PROCESSED PRODUCT, AS WELL AS PROCESSED PRODUCT MANUFACTURING DEVICE AND PROCESSED PRODUCT MANUFACTURING METHOD

The present invention provides a stamper and imprinting device capable of reducing unevenness in base film thickness, a processed product having a highly precise micropattern, and a processed product manufacturing device and a processed product manufacturing method capable of forming a highly precis...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HATOGAI TETSUHIRO, MORI KYOICHI
Format: Patent
Sprache:eng ; fre ; jpn
Schlagworte:
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