APPARATUS FOR TREATING A WAFER-SHAPED ARTICLE
An apparatus for processing wafer-shaped articles comprises a closed process chamber, a chuck located within the closed process chamber, and at least one process liquid dispensing device disposed within the chamber. The closed process chamber comprises a lid that can be opened to position a wafer-sh...
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| creator | HOHENWARTER, KARL-HEINZ |
| description | An apparatus for processing wafer-shaped articles comprises a closed process chamber, a chuck located within the closed process chamber, and at least one process liquid dispensing device disposed within the chamber. The closed process chamber comprises a lid that can be opened to position a wafer-shaped article within the closed process chamber. The lid incorporates a heater adapted to heat a wafer-shaped article positioned in the closed process chamber.
Appareil pour traiter des articles en forme de tranches, comportant une chambre de traitement fermée, un mandrin de serrage situé à l'intérieur de la chambre de traitement fermée, et au moins un dispositif distributeur de liquide de traitement monté à l'intérieur de la chambre. La chambre de traitement fermée comporte un couvercle qui peut être ouvert pour placer un article en forme de tranche à l'intérieur de ladite chambre. Le couvercle comprend un dispositif chauffant conçu pour chauffer un article en forme de tranche placé dans la chambre de traitement fermée. |
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Appareil pour traiter des articles en forme de tranches, comportant une chambre de traitement fermée, un mandrin de serrage situé à l'intérieur de la chambre de traitement fermée, et au moins un dispositif distributeur de liquide de traitement monté à l'intérieur de la chambre. La chambre de traitement fermée comporte un couvercle qui peut être ouvert pour placer un article en forme de tranche à l'intérieur de ladite chambre. Le couvercle comprend un dispositif chauffant conçu pour chauffer un article en forme de tranche placé dans la chambre de traitement fermée.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2015</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNB1DAhwDHIMCQ1WcPMPUggJcnUM8fRzV3BUCHd0cw3SDfZwDHB1UXAMCvF09nHlYWBNS8wpTuWF0twMym6uIc4euqkF-fGpxQWJyal5qSXx4f5GBobGBgamhqamjsbGxKkCAEDdJiY</recordid><startdate>20150806</startdate><enddate>20150806</enddate><creator>HOHENWARTER, KARL-HEINZ</creator><scope>EVB</scope></search><sort><creationdate>20150806</creationdate><title>APPARATUS FOR TREATING A WAFER-SHAPED ARTICLE</title><author>HOHENWARTER, KARL-HEINZ</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2013005155A33</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2015</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>HOHENWARTER, KARL-HEINZ</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>HOHENWARTER, KARL-HEINZ</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>APPARATUS FOR TREATING A WAFER-SHAPED ARTICLE</title><date>2015-08-06</date><risdate>2015</risdate><abstract>An apparatus for processing wafer-shaped articles comprises a closed process chamber, a chuck located within the closed process chamber, and at least one process liquid dispensing device disposed within the chamber. The closed process chamber comprises a lid that can be opened to position a wafer-shaped article within the closed process chamber. The lid incorporates a heater adapted to heat a wafer-shaped article positioned in the closed process chamber.
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | APPARATUS FOR TREATING A WAFER-SHAPED ARTICLE |
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