CRYOPUMP

A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a...

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Bibliographische Detailangaben
Hauptverfasser:	CASELLO, JOHN, J, SYSSOEV, SERGEI, BARTLETT, ALLEN, J, WELLS, JEFFREY, A, EACOBACCI, MICAHEL, J
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BLASTING GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS HEATING LIGHTING MECHANICAL ENGINEERING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS SEPARATION TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION TECHNICAL SUBJECTS COVERED BY FORMER USPC TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TRANSPORTING WEAPONS
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Beschreibung
Zusammenfassung:	A cryopump has a simple-to-manufacture frontal baffle plate with improved gas distribution and has a large-area second-stage array plate to capture Type II gases. The cryopump has a first-stage frontal baffle plate having orifices and flaps bent from and attached to the orifices. The cryopump has a second-stage top plate that is larger in area than cooling baffles of the second stage array. L'invention porte sur une cryopompe qui possède une plaque chicane frontale facile à fabriquer présentant une distribution de gaz perfectionnée et qui comporte une plaque de rangée de deuxième étage de grande surface pour capturer les gaz du type II. La cryopompe comporte une plaque chicane frontale de premier étage ayant des orifices et des volets qui sont repliés à partir des orifices et attachés à ceux-ci. La cryopompe comporte une plaque supérieure de deuxième étage qui présente une plus grande surface que les chicanes de refroidissement de la rangée de deuxième étage.