VAPOR DELIVERY SYSTEM FOR USE IN IMPRINT LITHOGRAPHY

Described are systems and method of using a vapor delivery system for enabling delivery of an adhesion promoter material during an imprint lithography process. L'invention concerne des systèmes et des procédés d'utilisation d'un système de délivrance de vapeurs pour permettre la déliv...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	JONES, CHRISTOPHER, E, RAMOS, RICK, FLETCHER, EDWARD, B, LABRAKE, DWAYNE, L, YE, ZHENGMAO
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING PERFORMING OPERATIONS SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR SHAPING OR JOINING OF PLASTICS TRANSPORTING WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
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