SUBSTRATE HEATING DEVICE

The invention relates to a susceptor for supporting a substrate (9) within a vacuum process chamber, comprising a flat surface (11) for placing the substrate (9) thereon such that the substrate (9) is in thermally conductive contact with the surface (11), whereby the susceptor (1) comprises at least...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	POPPELLER, MARKUS, SCHMOLL, RALPH, DESPONT, LAURENT
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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