ELECTRODE SURFACE MATERIALS AND STRUCTURES FOR PLASMA CHEMISTRY

The present disclosure provides for a plasma system, which includes a plasma device, an ionizable media source, and a power source. The plasma device includes an inner electrode and an outer electrode coaxially disposed around the inner electrode. At least one of the inner electrode and the outer el...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: COLLINS, GEORGE J, ANTIOCO, DOUGLAS K, CHO, JIN-HOON, KOO, IL-GYO, MOORE, CAMERON A
Format: Patent
Sprache:eng ; fre
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!