METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING

The invention relates to a method for obtaining coatings produced by depositing layers by means of magnetron cathode sputtering, in which the concentration of gas in the atmosphere, the distance to the target and the power during deposition are all controlled, thereby controlling the formation of na...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: FORTIO GODINHO, VANDA CRISTINA, FERNANDEZ CAMACHO, MA ASUNCION
Format: Patent
Sprache:eng ; fre ; spa
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
container_end_page
container_issue
container_start_page
container_title
container_volume
creator FORTIO GODINHO, VANDA CRISTINA
FERNANDEZ CAMACHO, MA ASUNCION
description The invention relates to a method for obtaining coatings produced by depositing layers by means of magnetron cathode sputtering, in which the concentration of gas in the atmosphere, the distance to the target and the power during deposition are all controlled, thereby controlling the formation of nano-bubbles in the microstructure of the coating obtained, producing pre-determined optical characteristics such as variable refractive index and reflectivity. The method allows refractive index to be controlled, while other characteristic properties of the material are maintained, such as chemical composition, mechanical strength and electric properties. El objeto de la invención es un procedimiento de obtención de recubrimientos realizado por deposición de capas mediante pulverización catódica con magnetrón en el cual se regula la concentración de gas presente en la atmósfera, la distancia al blanco y la potencia durante la deposición y así controlar la formación de nano-burbujas en la microestructura del recubrimiento obtenido que da lugar a unas determinadas características ópticas como reflectividad y índice de refracción variable. El método permite controlar el índice de refracción manteniendo otras propiedades características del material como composición química, resistencia mecánica y propiedades eléctricas. L'invention concerne un procédé permettant d'obtenir des enrobages par dépôt de couches par pulvérisation cathodique à l'aide d'un magnétron dans lequel on régule la concentration de gaz dans l'atmosphère, la distance jusqu'à la cible et la puissance pendant le dépôt, ce qui permet de contrôler la formation de nano-bulles dans la microstructure de l'enrobage obtenu et d'obtenir des caractéristiques optiques déterminées, telles que la réflectivité et l'indice de réfraction variable. Le procédé susmentionné permet à la fois de contrôler l'indice de réfraction et de conserver d'autres propriétés caractéristiques du matériau, telles que la composition chimique, la résistance mécanique et les propriétés électriques.
format Patent
fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_WO2010122202A3</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>WO2010122202A3</sourcerecordid><originalsourceid>FETCH-epo_espacenet_WO2010122202A33</originalsourceid><addsrcrecordid>eNrjZAjydQ3x8HdRcPMPUvB3CnH09PP0c1dw9ncMAdLBCk6RCr6ujn7BCv5uCs6OIJWuCsEBoSEhrkEgdY5-LgpBrsGhPiFIungYWNMSc4pTeaE0N4Oym2uIs4duakF-fGpxQWJyal5qSXy4v5GBoYGhkZGRgZGjsTFxqgB4PDBG</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING</title><source>esp@cenet</source><creator>FORTIO GODINHO, VANDA CRISTINA ; FERNANDEZ CAMACHO, MA ASUNCION</creator><creatorcontrib>FORTIO GODINHO, VANDA CRISTINA ; FERNANDEZ CAMACHO, MA ASUNCION</creatorcontrib><description>The invention relates to a method for obtaining coatings produced by depositing layers by means of magnetron cathode sputtering, in which the concentration of gas in the atmosphere, the distance to the target and the power during deposition are all controlled, thereby controlling the formation of nano-bubbles in the microstructure of the coating obtained, producing pre-determined optical characteristics such as variable refractive index and reflectivity. The method allows refractive index to be controlled, while other characteristic properties of the material are maintained, such as chemical composition, mechanical strength and electric properties. El objeto de la invención es un procedimiento de obtención de recubrimientos realizado por deposición de capas mediante pulverización catódica con magnetrón en el cual se regula la concentración de gas presente en la atmósfera, la distancia al blanco y la potencia durante la deposición y así controlar la formación de nano-burbujas en la microestructura del recubrimiento obtenido que da lugar a unas determinadas características ópticas como reflectividad y índice de refracción variable. El método permite controlar el índice de refracción manteniendo otras propiedades características del material como composición química, resistencia mecánica y propiedades eléctricas. L'invention concerne un procédé permettant d'obtenir des enrobages par dépôt de couches par pulvérisation cathodique à l'aide d'un magnétron dans lequel on régule la concentration de gaz dans l'atmosphère, la distance jusqu'à la cible et la puissance pendant le dépôt, ce qui permet de contrôler la formation de nano-bulles dans la microstructure de l'enrobage obtenu et d'obtenir des caractéristiques optiques déterminées, telles que la réflectivité et l'indice de réfraction variable. Le procédé susmentionné permet à la fois de contrôler l'indice de réfraction et de conserver d'autres propriétés caractéristiques du matériau, telles que la composition chimique, la résistance mécanique et les propriétés électriques.</description><language>eng ; fre ; spa</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20130131&amp;DB=EPODOC&amp;CC=WO&amp;NR=2010122202A3$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20130131&amp;DB=EPODOC&amp;CC=WO&amp;NR=2010122202A3$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>FORTIO GODINHO, VANDA CRISTINA</creatorcontrib><creatorcontrib>FERNANDEZ CAMACHO, MA ASUNCION</creatorcontrib><title>METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING</title><description>The invention relates to a method for obtaining coatings produced by depositing layers by means of magnetron cathode sputtering, in which the concentration of gas in the atmosphere, the distance to the target and the power during deposition are all controlled, thereby controlling the formation of nano-bubbles in the microstructure of the coating obtained, producing pre-determined optical characteristics such as variable refractive index and reflectivity. The method allows refractive index to be controlled, while other characteristic properties of the material are maintained, such as chemical composition, mechanical strength and electric properties. El objeto de la invención es un procedimiento de obtención de recubrimientos realizado por deposición de capas mediante pulverización catódica con magnetrón en el cual se regula la concentración de gas presente en la atmósfera, la distancia al blanco y la potencia durante la deposición y así controlar la formación de nano-burbujas en la microestructura del recubrimiento obtenido que da lugar a unas determinadas características ópticas como reflectividad y índice de refracción variable. El método permite controlar el índice de refracción manteniendo otras propiedades características del material como composición química, resistencia mecánica y propiedades eléctricas. L'invention concerne un procédé permettant d'obtenir des enrobages par dépôt de couches par pulvérisation cathodique à l'aide d'un magnétron dans lequel on régule la concentration de gaz dans l'atmosphère, la distance jusqu'à la cible et la puissance pendant le dépôt, ce qui permet de contrôler la formation de nano-bulles dans la microstructure de l'enrobage obtenu et d'obtenir des caractéristiques optiques déterminées, telles que la réflectivité et l'indice de réfraction variable. Le procédé susmentionné permet à la fois de contrôler l'indice de réfraction et de conserver d'autres propriétés caractéristiques du matériau, telles que la composition chimique, la résistance mécanique et les propriétés électriques.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZAjydQ3x8HdRcPMPUvB3CnH09PP0c1dw9ncMAdLBCk6RCr6ujn7BCv5uCs6OIJWuCsEBoSEhrkEgdY5-LgpBrsGhPiFIungYWNMSc4pTeaE0N4Oym2uIs4duakF-fGpxQWJyal5qSXy4v5GBoYGhkZGRgZGjsTFxqgB4PDBG</recordid><startdate>20130131</startdate><enddate>20130131</enddate><creator>FORTIO GODINHO, VANDA CRISTINA</creator><creator>FERNANDEZ CAMACHO, MA ASUNCION</creator><scope>EVB</scope></search><sort><creationdate>20130131</creationdate><title>METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING</title><author>FORTIO GODINHO, VANDA CRISTINA ; FERNANDEZ CAMACHO, MA ASUNCION</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2010122202A33</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; spa</language><creationdate>2013</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>FORTIO GODINHO, VANDA CRISTINA</creatorcontrib><creatorcontrib>FERNANDEZ CAMACHO, MA ASUNCION</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>FORTIO GODINHO, VANDA CRISTINA</au><au>FERNANDEZ CAMACHO, MA ASUNCION</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING</title><date>2013-01-31</date><risdate>2013</risdate><abstract>The invention relates to a method for obtaining coatings produced by depositing layers by means of magnetron cathode sputtering, in which the concentration of gas in the atmosphere, the distance to the target and the power during deposition are all controlled, thereby controlling the formation of nano-bubbles in the microstructure of the coating obtained, producing pre-determined optical characteristics such as variable refractive index and reflectivity. The method allows refractive index to be controlled, while other characteristic properties of the material are maintained, such as chemical composition, mechanical strength and electric properties. El objeto de la invención es un procedimiento de obtención de recubrimientos realizado por deposición de capas mediante pulverización catódica con magnetrón en el cual se regula la concentración de gas presente en la atmósfera, la distancia al blanco y la potencia durante la deposición y así controlar la formación de nano-burbujas en la microestructura del recubrimiento obtenido que da lugar a unas determinadas características ópticas como reflectividad y índice de refracción variable. El método permite controlar el índice de refracción manteniendo otras propiedades características del material como composición química, resistencia mecánica y propiedades eléctricas. L'invention concerne un procédé permettant d'obtenir des enrobages par dépôt de couches par pulvérisation cathodique à l'aide d'un magnétron dans lequel on régule la concentration de gaz dans l'atmosphère, la distance jusqu'à la cible et la puissance pendant le dépôt, ce qui permet de contrôler la formation de nano-bulles dans la microstructure de l'enrobage obtenu et d'obtenir des caractéristiques optiques déterminées, telles que la réflectivité et l'indice de réfraction variable. Le procédé susmentionné permet à la fois de contrôler l'indice de réfraction et de conserver d'autres propriétés caractéristiques du matériau, telles que la composition chimique, la résistance mécanique et les propriétés électriques.</abstract><oa>free_for_read</oa></addata></record>
fulltext fulltext_linktorsrc
identifier
ispartof
issn
language eng ; fre ; spa
recordid cdi_epo_espacenet_WO2010122202A3
source esp@cenet
subjects CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
METALLURGY
SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
title METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-22T02%3A35%3A49IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=FORTIO%20GODINHO,%20VANDA%20CRISTINA&rft.date=2013-01-31&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EWO2010122202A3%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true