METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING
The invention relates to a method for obtaining coatings produced by depositing layers by means of magnetron cathode sputtering, in which the concentration of gas in the atmosphere, the distance to the target and the power during deposition are all controlled, thereby controlling the formation of na...
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creator | FORTIO GODINHO, VANDA CRISTINA FERNANDEZ CAMACHO, MA ASUNCION |
description | The invention relates to a method for obtaining coatings produced by depositing layers by means of magnetron cathode sputtering, in which the concentration of gas in the atmosphere, the distance to the target and the power during deposition are all controlled, thereby controlling the formation of nano-bubbles in the microstructure of the coating obtained, producing pre-determined optical characteristics such as variable refractive index and reflectivity. The method allows refractive index to be controlled, while other characteristic properties of the material are maintained, such as chemical composition, mechanical strength and electric properties.
El objeto de la invención es un procedimiento de obtención de recubrimientos realizado por deposición de capas mediante pulverización catódica con magnetrón en el cual se regula la concentración de gas presente en la atmósfera, la distancia al blanco y la potencia durante la deposición y así controlar la formación de nano-burbujas en la microestructura del recubrimiento obtenido que da lugar a unas determinadas características ópticas como reflectividad y índice de refracción variable. El método permite controlar el índice de refracción manteniendo otras propiedades características del material como composición química, resistencia mecánica y propiedades eléctricas.
L'invention concerne un procédé permettant d'obtenir des enrobages par dépôt de couches par pulvérisation cathodique à l'aide d'un magnétron dans lequel on régule la concentration de gaz dans l'atmosphère, la distance jusqu'à la cible et la puissance pendant le dépôt, ce qui permet de contrôler la formation de nano-bulles dans la microstructure de l'enrobage obtenu et d'obtenir des caractéristiques optiques déterminées, telles que la réflectivité et l'indice de réfraction variable. Le procédé susmentionné permet à la fois de contrôler l'indice de réfraction et de conserver d'autres propriétés caractéristiques du matériau, telles que la composition chimique, la résistance mécanique et les propriétés électriques. |
format | Patent |
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El objeto de la invención es un procedimiento de obtención de recubrimientos realizado por deposición de capas mediante pulverización catódica con magnetrón en el cual se regula la concentración de gas presente en la atmósfera, la distancia al blanco y la potencia durante la deposición y así controlar la formación de nano-burbujas en la microestructura del recubrimiento obtenido que da lugar a unas determinadas características ópticas como reflectividad y índice de refracción variable. El método permite controlar el índice de refracción manteniendo otras propiedades características del material como composición química, resistencia mecánica y propiedades eléctricas.
L'invention concerne un procédé permettant d'obtenir des enrobages par dépôt de couches par pulvérisation cathodique à l'aide d'un magnétron dans lequel on régule la concentration de gaz dans l'atmosphère, la distance jusqu'à la cible et la puissance pendant le dépôt, ce qui permet de contrôler la formation de nano-bulles dans la microstructure de l'enrobage obtenu et d'obtenir des caractéristiques optiques déterminées, telles que la réflectivité et l'indice de réfraction variable. Le procédé susmentionné permet à la fois de contrôler l'indice de réfraction et de conserver d'autres propriétés caractéristiques du matériau, telles que la composition chimique, la résistance mécanique et les propriétés électriques.</description><language>eng ; fre ; spa</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2013</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130131&DB=EPODOC&CC=WO&NR=2010122202A3$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76294</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20130131&DB=EPODOC&CC=WO&NR=2010122202A3$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>FORTIO GODINHO, VANDA CRISTINA</creatorcontrib><creatorcontrib>FERNANDEZ CAMACHO, MA ASUNCION</creatorcontrib><title>METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING</title><description>The invention relates to a method for obtaining coatings produced by depositing layers by means of magnetron cathode sputtering, in which the concentration of gas in the atmosphere, the distance to the target and the power during deposition are all controlled, thereby controlling the formation of nano-bubbles in the microstructure of the coating obtained, producing pre-determined optical characteristics such as variable refractive index and reflectivity. The method allows refractive index to be controlled, while other characteristic properties of the material are maintained, such as chemical composition, mechanical strength and electric properties.
El objeto de la invención es un procedimiento de obtención de recubrimientos realizado por deposición de capas mediante pulverización catódica con magnetrón en el cual se regula la concentración de gas presente en la atmósfera, la distancia al blanco y la potencia durante la deposición y así controlar la formación de nano-burbujas en la microestructura del recubrimiento obtenido que da lugar a unas determinadas características ópticas como reflectividad y índice de refracción variable. El método permite controlar el índice de refracción manteniendo otras propiedades características del material como composición química, resistencia mecánica y propiedades eléctricas.
L'invention concerne un procédé permettant d'obtenir des enrobages par dépôt de couches par pulvérisation cathodique à l'aide d'un magnétron dans lequel on régule la concentration de gaz dans l'atmosphère, la distance jusqu'à la cible et la puissance pendant le dépôt, ce qui permet de contrôler la formation de nano-bulles dans la microstructure de l'enrobage obtenu et d'obtenir des caractéristiques optiques déterminées, telles que la réflectivité et l'indice de réfraction variable. Le procédé susmentionné permet à la fois de contrôler l'indice de réfraction et de conserver d'autres propriétés caractéristiques du matériau, telles que la composition chimique, la résistance mécanique et les propriétés électriques.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2013</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZAjydQ3x8HdRcPMPUvB3CnH09PP0c1dw9ncMAdLBCk6RCr6ujn7BCv5uCs6OIJWuCsEBoSEhrkEgdY5-LgpBrsGhPiFIungYWNMSc4pTeaE0N4Oym2uIs4duakF-fGpxQWJyal5qSXy4v5GBoYGhkZGRgZGjsTFxqgB4PDBG</recordid><startdate>20130131</startdate><enddate>20130131</enddate><creator>FORTIO GODINHO, VANDA CRISTINA</creator><creator>FERNANDEZ CAMACHO, MA ASUNCION</creator><scope>EVB</scope></search><sort><creationdate>20130131</creationdate><title>METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING</title><author>FORTIO GODINHO, VANDA CRISTINA ; FERNANDEZ CAMACHO, MA ASUNCION</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2010122202A33</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre ; spa</language><creationdate>2013</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>FORTIO GODINHO, VANDA CRISTINA</creatorcontrib><creatorcontrib>FERNANDEZ CAMACHO, MA ASUNCION</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>FORTIO GODINHO, VANDA CRISTINA</au><au>FERNANDEZ CAMACHO, MA ASUNCION</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING</title><date>2013-01-31</date><risdate>2013</risdate><abstract>The invention relates to a method for obtaining coatings produced by depositing layers by means of magnetron cathode sputtering, in which the concentration of gas in the atmosphere, the distance to the target and the power during deposition are all controlled, thereby controlling the formation of nano-bubbles in the microstructure of the coating obtained, producing pre-determined optical characteristics such as variable refractive index and reflectivity. The method allows refractive index to be controlled, while other characteristic properties of the material are maintained, such as chemical composition, mechanical strength and electric properties.
El objeto de la invención es un procedimiento de obtención de recubrimientos realizado por deposición de capas mediante pulverización catódica con magnetrón en el cual se regula la concentración de gas presente en la atmósfera, la distancia al blanco y la potencia durante la deposición y así controlar la formación de nano-burbujas en la microestructura del recubrimiento obtenido que da lugar a unas determinadas características ópticas como reflectividad y índice de refracción variable. El método permite controlar el índice de refracción manteniendo otras propiedades características del material como composición química, resistencia mecánica y propiedades eléctricas.
L'invention concerne un procédé permettant d'obtenir des enrobages par dépôt de couches par pulvérisation cathodique à l'aide d'un magnétron dans lequel on régule la concentration de gaz dans l'atmosphère, la distance jusqu'à la cible et la puissance pendant le dépôt, ce qui permet de contrôler la formation de nano-bulles dans la microstructure de l'enrobage obtenu et d'obtenir des caractéristiques optiques déterminées, telles que la réflectivité et l'indice de réfraction variable. Le procédé susmentionné permet à la fois de contrôler l'indice de réfraction et de conserver d'autres propriétés caractéristiques du matériau, telles que la composition chimique, la résistance mécanique et les propriétés électriques.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
title | METHOD FOR OBTAINING COATINGS BY MEANS OF CATHODE SPUTTERING AND RESULTING COATING |
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