METHOD OF FORMING A DEVICE WITH A PIEZORESISTOR AND ACCELEROMETER
A method of forming a device with a piezoresistor is disclosed herein. In one embodiment, the method includes providing a substrate, etching a trench in the substrate to form a vertical wall, growing a piezoresistor layer epitaxially on the vertical wall, and separating the vertical wall from an und...
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| creator | BARLIAN, ARNOLDUS, ALVIN YAMA, GARY PRUITT, BETH |
| description | A method of forming a device with a piezoresistor is disclosed herein. In one embodiment, the method includes providing a substrate, etching a trench in the substrate to form a vertical wall, growing a piezoresistor layer epitaxially on the vertical wall, and separating the vertical wall from an underlying layer of the substrate that extends along a horizontal plane such that the piezoresistor layer is movable with respect to the underlying layer within the horizontal plane.
La présente invention concerne un procédé de formation d'un dispositif avec une piézorésistance. Dans un mode de réalisation, le procédé consiste à réaliser un substrat, à graver une tranchée dans le substrat pour former une paroi verticale, à faire croître épitaxiquement une couche de piézorésistance sur la paroi verticale, et à séparer la paroi verticale d'une couche sous-jacente du substrat qui s'étend le long d'un plan horizontal de telle sorte que la couche de piézorésistance soit mobile par rapport à la couche sous-jacente dans le plan horizontal. |
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La présente invention concerne un procédé de formation d'un dispositif avec une piézorésistance. Dans un mode de réalisation, le procédé consiste à réaliser un substrat, à graver une tranchée dans le substrat pour former une paroi verticale, à faire croître épitaxiquement une couche de piézorésistance sur la paroi verticale, et à séparer la paroi verticale d'une couche sous-jacente du substrat qui s'étend le long d'un plan horizontal de telle sorte que la couche de piézorésistance soit mobile par rapport à la couche sous-jacente dans le plan horizontal.</description><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; GYROSCOPIC INSTRUMENTS ; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT ; MEASURING ; MEASURING DISTANCES, LEVELS OR BEARINGS ; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK ; NAVIGATION ; PHOTOGRAMMETRY OR VIDEOGRAMMETRY ; PHYSICS ; SEMICONDUCTOR DEVICES ; SURVEYING ; TESTING</subject><creationdate>2010</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20100722&DB=EPODOC&CC=WO&NR=2010083158A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20100722&DB=EPODOC&CC=WO&NR=2010083158A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BARLIAN, ARNOLDUS, ALVIN</creatorcontrib><creatorcontrib>YAMA, GARY</creatorcontrib><creatorcontrib>PRUITT, BETH</creatorcontrib><title>METHOD OF FORMING A DEVICE WITH A PIEZORESISTOR AND ACCELEROMETER</title><description>A method of forming a device with a piezoresistor is disclosed herein. In one embodiment, the method includes providing a substrate, etching a trench in the substrate to form a vertical wall, growing a piezoresistor layer epitaxially on the vertical wall, and separating the vertical wall from an underlying layer of the substrate that extends along a horizontal plane such that the piezoresistor layer is movable with respect to the underlying layer within the horizontal plane.
La présente invention concerne un procédé de formation d'un dispositif avec une piézorésistance. Dans un mode de réalisation, le procédé consiste à réaliser un substrat, à graver une tranchée dans le substrat pour former une paroi verticale, à faire croître épitaxiquement une couche de piézorésistance sur la paroi verticale, et à séparer la paroi verticale d'une couche sous-jacente du substrat qui s'étend le long d'un plan horizontal de telle sorte que la couche de piézorésistance soit mobile par rapport à la couche sous-jacente dans le plan horizontal.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>GYROSCOPIC INSTRUMENTS</subject><subject>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</subject><subject>MEASURING</subject><subject>MEASURING DISTANCES, LEVELS OR BEARINGS</subject><subject>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</subject><subject>NAVIGATION</subject><subject>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</subject><subject>PHYSICS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SURVEYING</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2010</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHD0dQ3x8HdR8HdTcPMP8vX0c1dwVHBxDfN0dlUI9wzxAPICPF2j_INcgz2DQ_yDFBz9XBQcnZ1dfVyD_IF6XYN4GFjTEnOKU3mhNDeDsptriLOHbmpBfnxqcUFicmpeakl8uL-RgaGBgYWxoamFo6ExcaoAWy8rlg</recordid><startdate>20100722</startdate><enddate>20100722</enddate><creator>BARLIAN, ARNOLDUS, ALVIN</creator><creator>YAMA, GARY</creator><creator>PRUITT, BETH</creator><scope>EVB</scope></search><sort><creationdate>20100722</creationdate><title>METHOD OF FORMING A DEVICE WITH A PIEZORESISTOR AND ACCELEROMETER</title><author>BARLIAN, ARNOLDUS, ALVIN ; YAMA, GARY ; PRUITT, BETH</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2010083158A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2010</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>GYROSCOPIC INSTRUMENTS</topic><topic>INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT</topic><topic>MEASURING</topic><topic>MEASURING DISTANCES, LEVELS OR BEARINGS</topic><topic>MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK</topic><topic>NAVIGATION</topic><topic>PHOTOGRAMMETRY OR VIDEOGRAMMETRY</topic><topic>PHYSICS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SURVEYING</topic><topic>TESTING</topic><toplevel>online_resources</toplevel><creatorcontrib>BARLIAN, ARNOLDUS, ALVIN</creatorcontrib><creatorcontrib>YAMA, GARY</creatorcontrib><creatorcontrib>PRUITT, BETH</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>BARLIAN, ARNOLDUS, ALVIN</au><au>YAMA, GARY</au><au>PRUITT, BETH</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>METHOD OF FORMING A DEVICE WITH A PIEZORESISTOR AND ACCELEROMETER</title><date>2010-07-22</date><risdate>2010</risdate><abstract>A method of forming a device with a piezoresistor is disclosed herein. In one embodiment, the method includes providing a substrate, etching a trench in the substrate to form a vertical wall, growing a piezoresistor layer epitaxially on the vertical wall, and separating the vertical wall from an underlying layer of the substrate that extends along a horizontal plane such that the piezoresistor layer is movable with respect to the underlying layer within the horizontal plane.
La présente invention concerne un procédé de formation d'un dispositif avec une piézorésistance. Dans un mode de réalisation, le procédé consiste à réaliser un substrat, à graver une tranchée dans le substrat pour former une paroi verticale, à faire croître épitaxiquement une couche de piézorésistance sur la paroi verticale, et à séparer la paroi verticale d'une couche sous-jacente du substrat qui s'étend le long d'un plan horizontal de telle sorte que la couche de piézorésistance soit mobile par rapport à la couche sous-jacente dans le plan horizontal.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GYROSCOPIC INSTRUMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING DISTANCES, LEVELS OR BEARINGS MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK NAVIGATION PHOTOGRAMMETRY OR VIDEOGRAMMETRY PHYSICS SEMICONDUCTOR DEVICES SURVEYING TESTING |
| title | METHOD OF FORMING A DEVICE WITH A PIEZORESISTOR AND ACCELEROMETER |
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