APPLICATIONS AND METHODS FOR ALKALI SILICATE GLASS

An alkali silicate material is used as a dielectric during integrated circuit fabrication. The alkali silicate glass material is also deposited onto a substrate using a sprayer. An alkali silicate material is also co-deposited with a nano- or micro-particle composition or with an embedded passive or...

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Bibliographische Detailangaben
Hauptverfasser: BOONE, ALAN, P, WYCKOFF, NATHANIEL, P, HILLMAN, DAVID, D, HAMILTON, BRANDON, C, WILCOXON, ROSS, K, SMITH, GUY, N, LOWER, NATHAN, P
Format: Patent
Sprache:eng ; fre
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