SILICON FILTER

The invention provides a filter device comprising a first member wherein at least a portion of the first member is foraminous, a second member wherein at least a portion of the second member is foraminous, wherein there is a fixed gap space between the members and wherein the holes of the first and...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BAUMER, MICHAEL FRANK, KATERBERG, JAMES A, GUAN, SHAN
Format: Patent
Sprache:eng ; fre
Schlagworte:
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