A METHOD OF PATTERNING A HARD DISK MEDIUM

The invention relates to a method of patterning a hard disk medium, comprising the step of applying a lithographic process to a resistive top layer of the hard disk medium, wherein the resistive top layer is exposed to a beam having multiple electron or optical beamlets. Preferably, foci of the mult...

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Hauptverfasser: BASTEIN, ANTONIUS GERARDUS THEODORUS MARIA, MAAS, DIEDERIK JAN, KLINKHAMER, JACOB FREDERIK FRISO, OOSTROM, SJOERD, DE JAGER, PIETER WILLEM HERMAN
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creator BASTEIN, ANTONIUS GERARDUS THEODORUS MARIA
MAAS, DIEDERIK JAN
KLINKHAMER, JACOB FREDERIK FRISO
OOSTROM, SJOERD
DE JAGER, PIETER WILLEM HERMAN
description The invention relates to a method of patterning a hard disk medium, comprising the step of applying a lithographic process to a resistive top layer of the hard disk medium, wherein the resistive top layer is exposed to a beam having multiple electron or optical beamlets. Preferably, foci of the multiple beamlets are arranged at different radial distances from a center point of the hard disk, more preferably substantially on a line extending from the center point of the hard disk to an edge of the hard disk. L'invention concerne un procédé servant à configurer un disque dur et consistant à appliquer un traitement lithographique à une couche supérieure résistante du disque dur, ladite couche étant exposée à un faisceau composé de multiples petits faisceaux secondaires optiques ou électroniques. Les points focaux de ces faisceaux secondaires multiples sont, de préférence, situés à des distances radiales différentes d'un point central du disque dur et, dans un mode de réalisation préféré, sur une ligne s'étendant du point central du disque dur à un bord de celui-ci.
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language eng ; fre
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subjects INFORMATION STORAGE
INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER
MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES
NANOTECHNOLOGY
PERFORMING OPERATIONS
PHYSICS
SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES
TRANSPORTING
title A METHOD OF PATTERNING A HARD DISK MEDIUM
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