AN END EFFECTOR OF A ROBOT FOR TRANSPORTING SUBSTRATES

An end effector of a substrate transport robot includes an upper plate made of fiber-reinforced plastic (FRP); a lower plate made of fiber-reinforced plastic (FRP); and an intermediate member arranged between the upper plate and the lower plate and selected from the group consisting of aluminum, sta...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOKI, TERUKAZU, YUASA, ICHIRO, FUKAZU, ISAO, MARUYAMA, YUICHI
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!