AN END EFFECTOR OF A ROBOT FOR TRANSPORTING SUBSTRATES
An end effector of a substrate transport robot includes an upper plate made of fiber-reinforced plastic (FRP); a lower plate made of fiber-reinforced plastic (FRP); and an intermediate member arranged between the upper plate and the lower plate and selected from the group consisting of aluminum, sta...
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| creator | TOKI, TERUKAZU YUASA, ICHIRO FUKAZU, ISAO MARUYAMA, YUICHI |
| description | An end effector of a substrate transport robot includes an upper plate made of fiber-reinforced plastic (FRP); a lower plate made of fiber-reinforced plastic (FRP); and an intermediate member arranged between the upper plate and the lower plate and selected from the group consisting of aluminum, stainless steel and honeycomb-shaped fiber-reinforced plastic (FRP). Further, a substrate transport robot is equipped with the above end effector.
La présente invention concerne un élément effecteur terminal de robot de transport de substrat qui comprend une plaque supérieure faite de plastique renforcé de fibre de verre (FRP), une plaque inférieure faite du même matériau (FRP) et un membre intermédiaire placé entre la plaque supérieure et la plaque inférieure et sélectionné dans le groupe consistant en aluminium, acier inoxydable et plastique renforcé de fibre de verre (FRP) à nid d'abeille. En outre, un robot de transport de substrat est équipé de l'élément effecteur terminal présenté ci-dessus. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_WO2008124421A1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>WO2008124421A1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_WO2008124421A13</originalsourceid><addsrcrecordid>eNrjZDBz9FNw9XNRcHVzc3UO8Q9S8HdTcFQI8nfyD1FwA3JDghz9ggP8g0I8_dwVgkOdgoECIa7BPAysaYk5xam8UJqbQdnNNcTZQze1ID8-tbggMTk1L7UkPtzfyMDAwtDIxMTI0NHQmDhVAJeaKK8</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>AN END EFFECTOR OF A ROBOT FOR TRANSPORTING SUBSTRATES</title><source>esp@cenet</source><creator>TOKI, TERUKAZU ; YUASA, ICHIRO ; FUKAZU, ISAO ; MARUYAMA, YUICHI</creator><creatorcontrib>TOKI, TERUKAZU ; YUASA, ICHIRO ; FUKAZU, ISAO ; MARUYAMA, YUICHI</creatorcontrib><description>An end effector of a substrate transport robot includes an upper plate made of fiber-reinforced plastic (FRP); a lower plate made of fiber-reinforced plastic (FRP); and an intermediate member arranged between the upper plate and the lower plate and selected from the group consisting of aluminum, stainless steel and honeycomb-shaped fiber-reinforced plastic (FRP). Further, a substrate transport robot is equipped with the above end effector.
La présente invention concerne un élément effecteur terminal de robot de transport de substrat qui comprend une plaque supérieure faite de plastique renforcé de fibre de verre (FRP), une plaque inférieure faite du même matériau (FRP) et un membre intermédiaire placé entre la plaque supérieure et la plaque inférieure et sélectionné dans le groupe consistant en aluminium, acier inoxydable et plastique renforcé de fibre de verre (FRP) à nid d'abeille. En outre, un robot de transport de substrat est équipé de l'élément effecteur terminal présenté ci-dessus.</description><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; CHAMBERS PROVIDED WITH MANIPULATION DEVICES ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; HAND TOOLS ; MANIPULATORS ; PERFORMING OPERATIONS ; PORTABLE POWER-DRIVEN TOOLS ; SEMICONDUCTOR DEVICES ; TRANSPORTING</subject><creationdate>2008</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20081016&DB=EPODOC&CC=WO&NR=2008124421A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25563,76318</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20081016&DB=EPODOC&CC=WO&NR=2008124421A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>TOKI, TERUKAZU</creatorcontrib><creatorcontrib>YUASA, ICHIRO</creatorcontrib><creatorcontrib>FUKAZU, ISAO</creatorcontrib><creatorcontrib>MARUYAMA, YUICHI</creatorcontrib><title>AN END EFFECTOR OF A ROBOT FOR TRANSPORTING SUBSTRATES</title><description>An end effector of a substrate transport robot includes an upper plate made of fiber-reinforced plastic (FRP); a lower plate made of fiber-reinforced plastic (FRP); and an intermediate member arranged between the upper plate and the lower plate and selected from the group consisting of aluminum, stainless steel and honeycomb-shaped fiber-reinforced plastic (FRP). Further, a substrate transport robot is equipped with the above end effector.
La présente invention concerne un élément effecteur terminal de robot de transport de substrat qui comprend une plaque supérieure faite de plastique renforcé de fibre de verre (FRP), une plaque inférieure faite du même matériau (FRP) et un membre intermédiaire placé entre la plaque supérieure et la plaque inférieure et sélectionné dans le groupe consistant en aluminium, acier inoxydable et plastique renforcé de fibre de verre (FRP) à nid d'abeille. En outre, un robot de transport de substrat est équipé de l'élément effecteur terminal présenté ci-dessus.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHAMBERS PROVIDED WITH MANIPULATION DEVICES</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>HAND TOOLS</subject><subject>MANIPULATORS</subject><subject>PERFORMING OPERATIONS</subject><subject>PORTABLE POWER-DRIVEN TOOLS</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2008</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDBz9FNw9XNRcHVzc3UO8Q9S8HdTcFQI8nfyD1FwA3JDghz9ggP8g0I8_dwVgkOdgoECIa7BPAysaYk5xam8UJqbQdnNNcTZQze1ID8-tbggMTk1L7UkPtzfyMDAwtDIxMTI0NHQmDhVAJeaKK8</recordid><startdate>20081016</startdate><enddate>20081016</enddate><creator>TOKI, TERUKAZU</creator><creator>YUASA, ICHIRO</creator><creator>FUKAZU, ISAO</creator><creator>MARUYAMA, YUICHI</creator><scope>EVB</scope></search><sort><creationdate>20081016</creationdate><title>AN END EFFECTOR OF A ROBOT FOR TRANSPORTING SUBSTRATES</title><author>TOKI, TERUKAZU ; YUASA, ICHIRO ; FUKAZU, ISAO ; MARUYAMA, YUICHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2008124421A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2008</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHAMBERS PROVIDED WITH MANIPULATION DEVICES</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>HAND TOOLS</topic><topic>MANIPULATORS</topic><topic>PERFORMING OPERATIONS</topic><topic>PORTABLE POWER-DRIVEN TOOLS</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>TOKI, TERUKAZU</creatorcontrib><creatorcontrib>YUASA, ICHIRO</creatorcontrib><creatorcontrib>FUKAZU, ISAO</creatorcontrib><creatorcontrib>MARUYAMA, YUICHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>TOKI, TERUKAZU</au><au>YUASA, ICHIRO</au><au>FUKAZU, ISAO</au><au>MARUYAMA, YUICHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>AN END EFFECTOR OF A ROBOT FOR TRANSPORTING SUBSTRATES</title><date>2008-10-16</date><risdate>2008</risdate><abstract>An end effector of a substrate transport robot includes an upper plate made of fiber-reinforced plastic (FRP); a lower plate made of fiber-reinforced plastic (FRP); and an intermediate member arranged between the upper plate and the lower plate and selected from the group consisting of aluminum, stainless steel and honeycomb-shaped fiber-reinforced plastic (FRP). Further, a substrate transport robot is equipped with the above end effector.
La présente invention concerne un élément effecteur terminal de robot de transport de substrat qui comprend une plaque supérieure faite de plastique renforcé de fibre de verre (FRP), une plaque inférieure faite du même matériau (FRP) et un membre intermédiaire placé entre la plaque supérieure et la plaque inférieure et sélectionné dans le groupe consistant en aluminium, acier inoxydable et plastique renforcé de fibre de verre (FRP) à nid d'abeille. En outre, un robot de transport de substrat est équipé de l'élément effecteur terminal présenté ci-dessus.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CHAMBERS PROVIDED WITH MANIPULATION DEVICES ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS MANIPULATORS PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS SEMICONDUCTOR DEVICES TRANSPORTING |
| title | AN END EFFECTOR OF A ROBOT FOR TRANSPORTING SUBSTRATES |
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