NANO ELECTROMECHANICAL INTEGRATED-CIRCUIT FILTER

A nano electromechanical integrated circuit filter and method of making. The filter comprises a silicon substrate; a sacrificial layer; a device layer including at least one resonator, wherein the resonator includes sub-micron excitable elements and wherein the at least one resonator posses a fundam...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	BADZEY, ROBERT, L, GAIDARZHY, ALEXEI, MOHANTY, PRITIRAJ
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS BASIC ELECTRONIC CIRCUITRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS RESONATORS SEMICONDUCTOR DEVICES
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