SYSTEMS AND METHODS FOR OPERATING AND MONITORING ABATEMENT SYSTEMS

Methods and systems are provided for abating effluent from a process tool. The invention includes one or more process tools; one or more abatement systems; and an interface manifold adapted to establish effluent fluid communication between the one or more process tools and the one or more abatement...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	CRAWFORD, SHAUN, W, LOLDJ, YOUSSEF, A
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TRANSPORTING
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