PLASMA DEPOSITION APPARATUS AND METHOD FOR MAKING SOLAR CELLS
A plasma deposition apparatus for making solar cells comprising a conveyor having a longitudinal axis for supporting at least one substrate; at least two modules each having at least one plasma torch for depositing a layer of a reaction product on the at least one substrate, the at least one plasma...
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| creator | WU, DAU ASLAMI, MOHD, A |
| description | A plasma deposition apparatus for making solar cells comprising a conveyor having a longitudinal axis for supporting at least one substrate; at least two modules each having at least one plasma torch for depositing a layer of a reaction product on the at least one substrate, the at least one plasma torch located a distance from the at least one substrate; a chamber for containing the conveyor and the at least two modules; and an exhaust system. In another embodiment, the plasma deposition apparatus for making solar cells comprises: means for supporting a substrate; means for supplying reactants; plasma torch means for depositing a product on the substrate, the plasma torch means located a distance from the substrate; and means for oscillating the plasma torch means relative to the substrate.
L'invention concerne un appareil de dépôt par plasma pour la fabrication de cellules solaires, qui comprend : une courroie transporteuse ayant un axe longitudinal, destinée à soutenir au moins un substrat; au moins deux modules comprenant chacun au moins une torche au plasma destinée à déposer une couche de produit de réaction sur ledit substrat, ladite torche au plasma étant située à une certaine distance du substrat; une chambre destinée à contenir la courroie transporteuse et les deux modules précités; et un système d'échappement. Dans un autre mode de réalisation, l'appareil de dépôt par plasma pour la fabrication de cellules solaires comprend: des moyens de support de substrat; des moyens d'approvisionnement en réactifs; des moyens torche au plasma permettant de déposer un produit sur le substrat, les moyens torche au plasma étant situés à une certaine distance du substrat; et des moyens permettant de faire osciller les moyens torche au plasma par rapport au substrat. |
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| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_WO2007120776A8</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>WO2007120776A8</sourcerecordid><originalsourceid>FETCH-epo_espacenet_WO2007120776A83</originalsourceid><addsrcrecordid>eNrjZLAN8HEM9nVUcHEN8A_2DPH091NwDAhwDHIMCQ1WcPRzUfB1DfHwd1Fw8w9S8HX09vRzVwj293EMUnB29fEJ5mFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8eH-RgYG5oZGBubmZo4WxsSpAgDPBiq1</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>PLASMA DEPOSITION APPARATUS AND METHOD FOR MAKING SOLAR CELLS</title><source>esp@cenet</source><creator>WU, DAU ; ASLAMI, MOHD, A</creator><creatorcontrib>WU, DAU ; ASLAMI, MOHD, A</creatorcontrib><description>A plasma deposition apparatus for making solar cells comprising a conveyor having a longitudinal axis for supporting at least one substrate; at least two modules each having at least one plasma torch for depositing a layer of a reaction product on the at least one substrate, the at least one plasma torch located a distance from the at least one substrate; a chamber for containing the conveyor and the at least two modules; and an exhaust system. In another embodiment, the plasma deposition apparatus for making solar cells comprises: means for supporting a substrate; means for supplying reactants; plasma torch means for depositing a product on the substrate, the plasma torch means located a distance from the substrate; and means for oscillating the plasma torch means relative to the substrate.
L'invention concerne un appareil de dépôt par plasma pour la fabrication de cellules solaires, qui comprend : une courroie transporteuse ayant un axe longitudinal, destinée à soutenir au moins un substrat; au moins deux modules comprenant chacun au moins une torche au plasma destinée à déposer une couche de produit de réaction sur ledit substrat, ladite torche au plasma étant située à une certaine distance du substrat; une chambre destinée à contenir la courroie transporteuse et les deux modules précités; et un système d'échappement. Dans un autre mode de réalisation, l'appareil de dépôt par plasma pour la fabrication de cellules solaires comprend: des moyens de support de substrat; des moyens d'approvisionnement en réactifs; des moyens torche au plasma permettant de déposer un produit sur le substrat, les moyens torche au plasma étant situés à une certaine distance du substrat; et des moyens permettant de faire osciller les moyens torche au plasma par rapport au substrat.</description><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SEMICONDUCTOR DEVICES ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2009</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20090305&DB=EPODOC&CC=WO&NR=2007120776A8$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20090305&DB=EPODOC&CC=WO&NR=2007120776A8$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>WU, DAU</creatorcontrib><creatorcontrib>ASLAMI, MOHD, A</creatorcontrib><title>PLASMA DEPOSITION APPARATUS AND METHOD FOR MAKING SOLAR CELLS</title><description>A plasma deposition apparatus for making solar cells comprising a conveyor having a longitudinal axis for supporting at least one substrate; at least two modules each having at least one plasma torch for depositing a layer of a reaction product on the at least one substrate, the at least one plasma torch located a distance from the at least one substrate; a chamber for containing the conveyor and the at least two modules; and an exhaust system. In another embodiment, the plasma deposition apparatus for making solar cells comprises: means for supporting a substrate; means for supplying reactants; plasma torch means for depositing a product on the substrate, the plasma torch means located a distance from the substrate; and means for oscillating the plasma torch means relative to the substrate.
L'invention concerne un appareil de dépôt par plasma pour la fabrication de cellules solaires, qui comprend : une courroie transporteuse ayant un axe longitudinal, destinée à soutenir au moins un substrat; au moins deux modules comprenant chacun au moins une torche au plasma destinée à déposer une couche de produit de réaction sur ledit substrat, ladite torche au plasma étant située à une certaine distance du substrat; une chambre destinée à contenir la courroie transporteuse et les deux modules précités; et un système d'échappement. Dans un autre mode de réalisation, l'appareil de dépôt par plasma pour la fabrication de cellules solaires comprend: des moyens de support de substrat; des moyens d'approvisionnement en réactifs; des moyens torche au plasma permettant de déposer un produit sur le substrat, les moyens torche au plasma étant situés à une certaine distance du substrat; et des moyens permettant de faire osciller les moyens torche au plasma par rapport au substrat.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SEMICONDUCTOR DEVICES</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2009</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZLAN8HEM9nVUcHEN8A_2DPH091NwDAhwDHIMCQ1WcPRzUfB1DfHwd1Fw8w9S8HX09vRzVwj293EMUnB29fEJ5mFgTUvMKU7lhdLcDMpuriHOHrqpBfnxqcUFicmpeakl8eH-RgYG5oZGBubmZo4WxsSpAgDPBiq1</recordid><startdate>20090305</startdate><enddate>20090305</enddate><creator>WU, DAU</creator><creator>ASLAMI, MOHD, A</creator><scope>EVB</scope></search><sort><creationdate>20090305</creationdate><title>PLASMA DEPOSITION APPARATUS AND METHOD FOR MAKING SOLAR CELLS</title><author>WU, DAU ; ASLAMI, MOHD, A</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2007120776A83</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2009</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SEMICONDUCTOR DEVICES</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>WU, DAU</creatorcontrib><creatorcontrib>ASLAMI, MOHD, A</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>WU, DAU</au><au>ASLAMI, MOHD, A</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>PLASMA DEPOSITION APPARATUS AND METHOD FOR MAKING SOLAR CELLS</title><date>2009-03-05</date><risdate>2009</risdate><abstract>A plasma deposition apparatus for making solar cells comprising a conveyor having a longitudinal axis for supporting at least one substrate; at least two modules each having at least one plasma torch for depositing a layer of a reaction product on the at least one substrate, the at least one plasma torch located a distance from the at least one substrate; a chamber for containing the conveyor and the at least two modules; and an exhaust system. In another embodiment, the plasma deposition apparatus for making solar cells comprises: means for supporting a substrate; means for supplying reactants; plasma torch means for depositing a product on the substrate, the plasma torch means located a distance from the substrate; and means for oscillating the plasma torch means relative to the substrate.
L'invention concerne un appareil de dépôt par plasma pour la fabrication de cellules solaires, qui comprend : une courroie transporteuse ayant un axe longitudinal, destinée à soutenir au moins un substrat; au moins deux modules comprenant chacun au moins une torche au plasma destinée à déposer une couche de produit de réaction sur ledit substrat, ladite torche au plasma étant située à une certaine distance du substrat; une chambre destinée à contenir la courroie transporteuse et les deux modules précités; et un système d'échappement. Dans un autre mode de réalisation, l'appareil de dépôt par plasma pour la fabrication de cellules solaires comprend: des moyens de support de substrat; des moyens d'approvisionnement en réactifs; des moyens torche au plasma permettant de déposer un produit sur le substrat, les moyens torche au plasma étant situés à une certaine distance du substrat; et des moyens permettant de faire osciller les moyens torche au plasma par rapport au substrat.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | PLASMA DEPOSITION APPARATUS AND METHOD FOR MAKING SOLAR CELLS |
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