METHOD AND APPARATUS FOR SIMULTANEOUS DETECTION AND MEASUREMENT OF CHARGED PARTICLES AT ONE OR MORE LEVELS OF PARTICLE FLUX FOR ANALYSIS OF SAME

A charged particle detector and method are disclosed providing for simultaneous detection and measurement of charged particles at one or more levels of particle flux in a measurement cycle. The detector provides multiple and independently selectable levels of integration and/or gain in a fully addre...

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Hauptverfasser: SPERLINE, ROGER, BARINAGA, CHARLES J, BARNES, JAMES H. IV, DENTON, BONNER M, ATLAS, EUGENE, KOPPENAAL, DAVID W, HIEFTJE, GARY
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creator SPERLINE, ROGER
BARINAGA, CHARLES J
BARNES, JAMES H. IV
DENTON, BONNER M
ATLAS, EUGENE
KOPPENAAL, DAVID W
HIEFTJE, GARY
description A charged particle detector and method are disclosed providing for simultaneous detection and measurement of charged particles at one or more levels of particle flux in a measurement cycle. The detector provides multiple and independently selectable levels of integration and/or gain in a fully addressable readout manner. La présente invention concerne un détecteur de particules chargées et un procédé permettant d'effectuer une détection et une mesure simultanées de particules chargées à un ou plusieurs niveaux de flux de particules dans un cycle de mesure. Le détecteur fournit de multiples niveaux d'intégration et/ou de gain indépendamment sélectionnable d'une manière entièrement adressable en lecture.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
title METHOD AND APPARATUS FOR SIMULTANEOUS DETECTION AND MEASUREMENT OF CHARGED PARTICLES AT ONE OR MORE LEVELS OF PARTICLE FLUX FOR ANALYSIS OF SAME
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