ION SOURCE WITH REMOVABLE ANODE ASSEMBLY

An ion source (1500) has a removable anode assembly (1550) that is separable and from a base assembly (1552) to allow for ease of servicing the consumable components of the anode assembly (1500). Such consumables are easily removable and replaceable and may include a gas distributor (1510), a therma...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	TOWNSEND, SCOTT A, SIEGFRIED, DANIEL E, BURTNER, DAVID M
Format:	Patent
Sprache:	eng ; fre
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!