WRITING A CIRCUIT DESIGN PATTERN WITH SHAPED PARTICLE BEAM FLASHES

A shaped particle beam writing strategy is used to write a pattern with a particle beam onto a substrate. The pattern comprises a circuit design that is fractured into a plurality of arbitrary polygons. The writing strategy comprises transforming and fracturing the arbitrary polygons into a pluralit...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SILLS, ROBERT, M, LOZES, RICHARD, L, BULLER, BENYAMIN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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