ENHANCED RAPID THERMAL PROCESSING APPARATUS AND METHOD

A heating arrangement heats a first major surface of a workpiece with an illumination energy such that a first portion of the illumination energy is directly incident upon the first major surface of the workpiece and a second portion of the illumination energy is directed such that, at least initial...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	DETS, SERGIY, MCCOY, STEVE, KRASNICH, MIKE, CAMM, DAVE, BUBULOVIC, MLADEN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BAKERS' OVENS BAKING BASIC ELECTRIC ELEMENTS EDIBLE DOUGHS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HUMAN NECESSITIES MACHINES OR EQUIPMENT FOR BAKING SEMICONDUCTOR DEVICES
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