SYSTEM AND METHOD FOR SPINNING SEMICONDUCTOR WAFERS

Systems and methods are disclosed to process first and second sides of a wafer. The system includes a platform adapted to receive and rotate said wafer; and first and second heads coupled to the platform to access said first and second sides of said wafer. L'invention concerne des systèmes et d...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	PHAM, XUYEN
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CLEANING CLEANING IN GENERAL PERFORMING OPERATIONS PREVENTION OF FOULING IN GENERAL TRANSPORTING
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