IMPROVED MICRO-MACHINED SUSPENSION PLATE WITH INTEGRAL PROOF MASS FOR USE IN A SEISMOMETER OR OTHER DEVICE

An accelerometer or a seismometer (1) using an in-plane suspension geometry having a suspension plate (2, 201) and at least one fixed capacitive plate (3a-b). The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements (6, 202), and an integrated pr...

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Bibliographische Detailangaben

Hauptverfasser:	PIKE, WILLIAM, THOMAS, STANDLEY, IAN, SYMS, RICHARD
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	DETECTING MASSES OR OBJECTS GEOPHYSICS GRAVITATIONAL MEASUREMENTS INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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