POLYSULFIDE THERMAL VAPOUR SOURCE FOR THIN SULFIDE FILM DEPOSITION
Abstract The present invention is a low pressure physical vapour deposition method for the deposition of multi element sulfide thin film phosphor compositions for electroluminescent devices where a thermal source comprising a polysulfide compound provides the source of sulfur species for phosphor fi...
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| creator | STILES, JAMES, ALEXANDER, ROBERT MOORE, JOHN, WESLEY BELLUZ, PAUL, BARRY, DEL, BEL |
| description | Abstract The present invention is a low pressure physical vapour deposition method for the deposition of multi element sulfide thin film phosphor compositions for electroluminescent devices where a thermal source comprising a polysulfide compound provides the source of sulfur species for phosphor film deposition and/or annealing. The method is particularly useful for the deposition of phosphors for full colour ac electroluminescent displays employing thick film dielectric layers with a high dielectric constant.
La présente invention concerne un procédé de dépôt physique en phase vapeur à basse pression permettant le dépôt de compositions de phosphore en film mince à éléments sulfure multiples destinés à des dispositifs électroluminescents. Ce procédé comprend une source thermique, laquelle comprend un composé polysulfure qui fournit à cette source des espèces chimiques sulfure pour un dépôt de film de phosphore et/ou un recuit. Ce procédé convient particulièrement pour le dépôt de phosphore destiné à des afficheurs électroluminescents ac en couleur utilisant des couches diélectriques de film épais avec une constante diélectrique élevée. |
| format | Patent |
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La présente invention concerne un procédé de dépôt physique en phase vapeur à basse pression permettant le dépôt de compositions de phosphore en film mince à éléments sulfure multiples destinés à des dispositifs électroluminescents. Ce procédé comprend une source thermique, laquelle comprend un composé polysulfure qui fournit à cette source des espèces chimiques sulfure pour un dépôt de film de phosphore et/ou un recuit. Ce procédé convient particulièrement pour le dépôt de phosphore destiné à des afficheurs électroluminescents ac en couleur utilisant des couches diélectriques de film épais avec une constante diélectrique élevée.</description><edition>7</edition><language>eng ; fre</language><subject>ADHESIVES ; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL ; CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; DYES ; ELECTRIC HEATING ; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE ; METALLURGY ; MISCELLANEOUS APPLICATIONS OF MATERIALS ; MISCELLANEOUS COMPOSITIONS ; NATURAL RESINS ; PAINTS ; PERFORMING OPERATIONS ; POLISHES ; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL ; SPRAYING OR ATOMISING IN GENERAL ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION ; TRANSPORTING</subject><creationdate>2005</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20050414&DB=EPODOC&CC=WO&NR=2005033360A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20050414&DB=EPODOC&CC=WO&NR=2005033360A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>STILES, JAMES, ALEXANDER, ROBERT</creatorcontrib><creatorcontrib>MOORE, JOHN, WESLEY</creatorcontrib><creatorcontrib>BELLUZ, PAUL, BARRY, DEL, BEL</creatorcontrib><title>POLYSULFIDE THERMAL VAPOUR SOURCE FOR THIN SULFIDE FILM DEPOSITION</title><description>Abstract The present invention is a low pressure physical vapour deposition method for the deposition of multi element sulfide thin film phosphor compositions for electroluminescent devices where a thermal source comprising a polysulfide compound provides the source of sulfur species for phosphor film deposition and/or annealing. The method is particularly useful for the deposition of phosphors for full colour ac electroluminescent displays employing thick film dielectric layers with a high dielectric constant.
La présente invention concerne un procédé de dépôt physique en phase vapeur à basse pression permettant le dépôt de compositions de phosphore en film mince à éléments sulfure multiples destinés à des dispositifs électroluminescents. Ce procédé comprend une source thermique, laquelle comprend un composé polysulfure qui fournit à cette source des espèces chimiques sulfure pour un dépôt de film de phosphore et/ou un recuit. Ce procédé convient particulièrement pour le dépôt de phosphore destiné à des afficheurs électroluminescents ac en couleur utilisant des couches diélectriques de film épais avec une constante diélectrique élevée.</description><subject>ADHESIVES</subject><subject>APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL</subject><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>DYES</subject><subject>ELECTRIC HEATING</subject><subject>ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE</subject><subject>METALLURGY</subject><subject>MISCELLANEOUS APPLICATIONS OF MATERIALS</subject><subject>MISCELLANEOUS COMPOSITIONS</subject><subject>NATURAL RESINS</subject><subject>PAINTS</subject><subject>PERFORMING OPERATIONS</subject><subject>POLISHES</subject><subject>PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL</subject><subject>SPRAYING OR ATOMISING IN GENERAL</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2005</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHAK8PeJDA71cfN0cVUI8XAN8nX0UQhzDPAPDVIIBhLOrgpu_kFAGU8_BZgyN08fXwUX1wD_YM8QT38_HgbWtMSc4lReKM3NoOzmGuLsoZtakB-fWlyQmJyal1oSH-5vZGBgamBsbGxm4GhoTJwqANfwLFw</recordid><startdate>20050414</startdate><enddate>20050414</enddate><creator>STILES, JAMES, ALEXANDER, ROBERT</creator><creator>MOORE, JOHN, WESLEY</creator><creator>BELLUZ, PAUL, BARRY, DEL, BEL</creator><scope>EVB</scope></search><sort><creationdate>20050414</creationdate><title>POLYSULFIDE THERMAL VAPOUR SOURCE FOR THIN SULFIDE FILM DEPOSITION</title><author>STILES, JAMES, ALEXANDER, ROBERT ; MOORE, JOHN, WESLEY ; BELLUZ, PAUL, BARRY, DEL, BEL</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO2005033360A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2005</creationdate><topic>ADHESIVES</topic><topic>APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL</topic><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>DYES</topic><topic>ELECTRIC HEATING</topic><topic>ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE</topic><topic>METALLURGY</topic><topic>MISCELLANEOUS APPLICATIONS OF MATERIALS</topic><topic>MISCELLANEOUS COMPOSITIONS</topic><topic>NATURAL RESINS</topic><topic>PAINTS</topic><topic>PERFORMING OPERATIONS</topic><topic>POLISHES</topic><topic>PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL</topic><topic>SPRAYING OR ATOMISING IN GENERAL</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>STILES, JAMES, ALEXANDER, ROBERT</creatorcontrib><creatorcontrib>MOORE, JOHN, WESLEY</creatorcontrib><creatorcontrib>BELLUZ, PAUL, BARRY, DEL, BEL</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>STILES, JAMES, ALEXANDER, ROBERT</au><au>MOORE, JOHN, WESLEY</au><au>BELLUZ, PAUL, BARRY, DEL, BEL</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>POLYSULFIDE THERMAL VAPOUR SOURCE FOR THIN SULFIDE FILM DEPOSITION</title><date>2005-04-14</date><risdate>2005</risdate><abstract>Abstract The present invention is a low pressure physical vapour deposition method for the deposition of multi element sulfide thin film phosphor compositions for electroluminescent devices where a thermal source comprising a polysulfide compound provides the source of sulfur species for phosphor film deposition and/or annealing. The method is particularly useful for the deposition of phosphors for full colour ac electroluminescent displays employing thick film dielectric layers with a high dielectric constant.
La présente invention concerne un procédé de dépôt physique en phase vapeur à basse pression permettant le dépôt de compositions de phosphore en film mince à éléments sulfure multiples destinés à des dispositifs électroluminescents. Ce procédé comprend une source thermique, laquelle comprend un composé polysulfure qui fournit à cette source des espèces chimiques sulfure pour un dépôt de film de phosphore et/ou un recuit. Ce procédé convient particulièrement pour le dépôt de phosphore destiné à des afficheurs électroluminescents ac en couleur utilisant des couches diélectriques de film épais avec une constante diélectrique élevée.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | ADHESIVES APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL DYES ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MATERIALS FOR MISCELLANEOUS APPLICATIONS, NOT PROVIDED FORELSEWHERE METALLURGY MISCELLANEOUS APPLICATIONS OF MATERIALS MISCELLANEOUS COMPOSITIONS NATURAL RESINS PAINTS PERFORMING OPERATIONS POLISHES PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL SPRAYING OR ATOMISING IN GENERAL SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TRANSPORTING |
| title | POLYSULFIDE THERMAL VAPOUR SOURCE FOR THIN SULFIDE FILM DEPOSITION |
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