METHOD FOR MANUFACTURING A PATTERNED STRUCTURE

A method for forming a micro- or nano-pattern of a material on a substrate is presented. The method utilizes a buffer layer assisted laser patterning (BLALP). A layered structure is formed on the substrate, this layered structure being in the form of spaced-apart regions of the substrate defined by...

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Bibliographische Detailangaben
Hauptverfasser: ASSCHER, MICHA, KERNER, GABRIEL
Format: Patent
Sprache:eng ; fre
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