APPARATUS FOR AUTOMATICALLY MEASURING THE RESISTIVITY OF SEMICONDUCTOR BOULES USING THE METHOD OF FOUR PROBES

An apparatus for the automated measurement and recording of the electrical resistivity of a semiconductor boule (1) or ingot (1) using the method of four probes. A four point boule support grid (22) is provided adjacent to the home position of a four tip probe (54) equipped with three axis linear mo...

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Hauptverfasser:	CHANDRA, MOHAN, DARLING, DAVID, BURGESS, GLEN, ALAN, ROMAN, L., DOLAN, CARTIER, CARL
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS TESTING
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