INTEGRATED SUBSTRATE HANDLER HAVING PRE-ALIGNER AND STORAGE POD ACCESS MECHANISM

Access to the interior of a substrate storage pod (22) in which substrates such as semiconductor wafers (74) are stored is gained using an access device (20) provided within a micro environment enclosure (26). The access device has a telescoping enclosure door (21) which serves to control access to...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GENOV, MILA, M, TODOROV, ALEX, D
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKING PERFORMING OPERATIONS PNEUMATIC TUBE CONVEYORS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING
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