GAS CLUSTER ION BEAM LOW MASS ION FILTER
Incorporating the use of a permanent magnet (252) within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam (148) to facilitate improved processing of workpieces (152). In an alternate embodiment, the effect of the permanent magnet may be controlled by the use of an el...
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| creator | TORTI, RICHARD, P DYKSTRA, JERALD, P |
| description | Incorporating the use of a permanent magnet (252) within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam (148) to facilitate improved processing of workpieces (152). In an alternate embodiment, the effect of the permanent magnet may be controlled by the use of an electrical coil. The above system eliminates problems related to power consumption and heat generation.
L'invention concerne l'utilisation d'un aimant permanent au sein d'un dispositif GCIB (faisceaux à ions d'amas gazeux) en vue de la séparation d'ions monomères indésirables provenant d'un faisceau à ions d'amas gazeux, afin de faciliter un traitement amélioré des pièces. Dans un autre mode de réalisation, l'effet de l'aimant permanent peut être commandé par l'utilisation d'une bobine électrique. Ce système élimine les problèmes liés à la consommation d'énergie et à la production de chaleur. |
| format | Patent |
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L'invention concerne l'utilisation d'un aimant permanent au sein d'un dispositif GCIB (faisceaux à ions d'amas gazeux) en vue de la séparation d'ions monomères indésirables provenant d'un faisceau à ions d'amas gazeux, afin de faciliter un traitement amélioré des pièces. Dans un autre mode de réalisation, l'effet de l'aimant permanent peut être commandé par l'utilisation d'une bobine électrique. Ce système élimine les problèmes liés à la consommation d'énergie et à la production de chaleur.</description><edition>7</edition><language>eng ; fre</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; PLASMA TECHNIQUE ; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS ; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</subject><creationdate>2001</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20011025&DB=EPODOC&CC=WO&NR=0140532A3$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20011025&DB=EPODOC&CC=WO&NR=0140532A3$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>TORTI, RICHARD, P</creatorcontrib><creatorcontrib>DYKSTRA, JERALD, P</creatorcontrib><title>GAS CLUSTER ION BEAM LOW MASS ION FILTER</title><description>Incorporating the use of a permanent magnet (252) within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam (148) to facilitate improved processing of workpieces (152). In an alternate embodiment, the effect of the permanent magnet may be controlled by the use of an electrical coil. The above system eliminates problems related to power consumption and heat generation.
L'invention concerne l'utilisation d'un aimant permanent au sein d'un dispositif GCIB (faisceaux à ions d'amas gazeux) en vue de la séparation d'ions monomères indésirables provenant d'un faisceau à ions d'amas gazeux, afin de faciliter un traitement amélioré des pièces. Dans un autre mode de réalisation, l'effet de l'aimant permanent peut être commandé par l'utilisation d'une bobine électrique. Ce système élimine les problèmes liés à la consommation d'énergie et à la production de chaleur.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>PLASMA TECHNIQUE</subject><subject>PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS</subject><subject>PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2001</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNBwdwxWcPYJDQ5xDVLw9PdTcHJ19FXw8Q9X8HUMDgaLuHn6ACV5GFjTEnOKU3mhNDeDgptriLOHbmpBfnxqcUFicmpeakl8uL-BoYmBqbGRo7ExEUoAnxcjZQ</recordid><startdate>20011025</startdate><enddate>20011025</enddate><creator>TORTI, RICHARD, P</creator><creator>DYKSTRA, JERALD, P</creator><scope>EVB</scope></search><sort><creationdate>20011025</creationdate><title>GAS CLUSTER ION BEAM LOW MASS ION FILTER</title><author>TORTI, RICHARD, P ; DYKSTRA, JERALD, P</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_WO0140532A33</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng ; fre</language><creationdate>2001</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>PLASMA TECHNIQUE</topic><topic>PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS</topic><topic>PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS</topic><toplevel>online_resources</toplevel><creatorcontrib>TORTI, RICHARD, P</creatorcontrib><creatorcontrib>DYKSTRA, JERALD, P</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>TORTI, RICHARD, P</au><au>DYKSTRA, JERALD, P</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>GAS CLUSTER ION BEAM LOW MASS ION FILTER</title><date>2001-10-25</date><risdate>2001</risdate><abstract>Incorporating the use of a permanent magnet (252) within a GCIB apparatus to separate undesirable monomer ions from a gas cluster ion beam (148) to facilitate improved processing of workpieces (152). In an alternate embodiment, the effect of the permanent magnet may be controlled by the use of an electrical coil. The above system eliminates problems related to power consumption and heat generation.
L'invention concerne l'utilisation d'un aimant permanent au sein d'un dispositif GCIB (faisceaux à ions d'amas gazeux) en vue de la séparation d'ions monomères indésirables provenant d'un faisceau à ions d'amas gazeux, afin de faciliter un traitement amélioré des pièces. Dans un autre mode de réalisation, l'effet de l'aimant permanent peut être commandé par l'utilisation d'une bobine électrique. Ce système élimine les problèmes liés à la consommation d'énergie et à la production de chaleur.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS |
| title | GAS CLUSTER ION BEAM LOW MASS ION FILTER |
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