A METHOD FOR PRODUCING NiTiHf ALLOY FILMS BY SPUTTERING
Disclosed is a method for producing ternary shape-memory alloy films employing sputtering process techniques using krypton as a process gas. L'invention concerne un procédé de production de films d'alliage à mémoire de forme ternaire dans lequel on utilise des techniques de traitement par...
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| creator | GOLD, TERRY, JACK RASMUSSEN, GREGORY, KELLER ZHANG, JINPING CHANG, FENGLIAN |
| description | Disclosed is a method for producing ternary shape-memory alloy films employing sputtering process techniques using krypton as a process gas.
L'invention concerne un procédé de production de films d'alliage à mémoire de forme ternaire dans lequel on utilise des techniques de traitement par pulvérisation au moyen de krypton en tant que gaz de traitement. |
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L'invention concerne un procédé de production de films d'alliage à mémoire de forme ternaire dans lequel on utilise des techniques de traitement par pulvérisation au moyen de krypton en tant que gaz de traitement.</description><edition>7</edition><language>eng ; fre</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2001</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20010329&DB=EPODOC&CC=WO&NR=0121852A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20010329&DB=EPODOC&CC=WO&NR=0121852A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>GOLD, TERRY, JACK</creatorcontrib><creatorcontrib>RASMUSSEN, GREGORY, KELLER</creatorcontrib><creatorcontrib>ZHANG, JINPING</creatorcontrib><creatorcontrib>CHANG, FENGLIAN</creatorcontrib><title>A METHOD FOR PRODUCING NiTiHf ALLOY FILMS BY SPUTTERING</title><description>Disclosed is a method for producing ternary shape-memory alloy films employing sputtering process techniques using krypton as a process gas.
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L'invention concerne un procédé de production de films d'alliage à mémoire de forme ternaire dans lequel on utilise des techniques de traitement par pulvérisation au moyen de krypton en tant que gaz de traitement.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | A METHOD FOR PRODUCING NiTiHf ALLOY FILMS BY SPUTTERING |
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