WAFER LEVEL BURN-IN AND ELECTRICAL TEST SYSTEM AND METHOD

A burn-in and electrical test system (20) includes a temperature controlled zone (22) and a cool zone (24) separated by a transition zone (25. The temperature controlled zone (22) is configured to receive a plurality of wafer cartridges (26) and connect the cartridges (26) to test electronics (28) a...

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Bibliographische Detailangaben
Hauptverfasser: RICHMOND, DONALD, PAUL, II, LOBACZ, JERZY, HOANG, JOHN, DINH
Format: Patent
Sprache:eng ; fre
Schlagworte:
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