WAFER LEVEL BURN-IN AND ELECTRICAL TEST SYSTEM AND METHOD
A burn-in and electrical test system (20) includes a temperature controlled zone (22) and a cool zone (24) separated by a transition zone (25. The temperature controlled zone (22) is configured to receive a plurality of wafer cartridges (26) and connect the cartridges (26) to test electronics (28) a...
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Format: | Patent |
Sprache: | eng ; fre |
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