A METHOD OF ALLOWING A STABLE POWER TRANSMISSION INTO A PLASMA PROCESSING CHAMBER

A method of processing a metal layer on a substrate. The method comprises disposing the substrate in a chamber having a dielectric member and processing gas. An interior surface of the dielectric member is heated to a temperature above about 150 DEG C and the metal layer is processed when processing...

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Bibliographische Detailangaben
Hauptverfasser:	HWANG, JENG, H, MAK, STEVE, S., Y, CHIANG, KANG-LIE
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	A method of processing a metal layer on a substrate. The method comprises disposing the substrate in a chamber having a dielectric member and processing gas. An interior surface of the dielectric member is heated to a temperature above about 150 DEG C and the metal layer is processed when processing power is passed through the heated dielectric member. Heating of the interior surface of the dielectric member essentially prevents deposits from forming on the interior surface and allows a stable power transmission through the dielectric member. L'invention concerne un procédé de traitement d'une couche métallique sur un substrat. Le procédé consiste à disposer le substrat dans une chambre comportant un élément diélectrique et un gaz de traitement. Une surface intérieure de l'élément diélectrique est chauffée à une température supérieure à 150 DEG C environ et la couche métallique est traitée par passage d'une énergie de traitement dans l'élément diélectrique chauffé. Le chauffage de la surface intérieure de l'élément diélectrique empêche essentiellement la formation de dépôts sur la surface intérieure et permet d'effectuer une transmission d'énergie stable dans l'élément diélectrique.