Instrument for transferring boats for thermal treatment of semiconductor

Instrument for transferring boats for thermal treatment of semiconductor

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Hauptverfasser: Katoh, Mitsuo, Ishii, Katsumi
Format: Patent
Sprache:eng
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_USD323173SS</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>USD323173SS</sourcerecordid><originalsourceid>FETCH-epo_espacenet_USD323173SS3</originalsourceid><addsrcrecordid>eNqNijsOwjAMQLMwoMIdfAEGyMAB-KjMKXNlggOVGruy3fuDgAMwPem9twzthc11rsQORRRcka2Q6sAPuAm6ffWTtOL4zoT-maWAUR2y8H3OLroKi4Kj0frHJsD51B3aDU3Sk02Yicn7azrGXdzuY0rxj-UFwQk1fQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Instrument for transferring boats for thermal treatment of semiconductor</title><source>esp@cenet</source><creator>Katoh, Mitsuo ; Ishii, Katsumi</creator><creatorcontrib>Katoh, Mitsuo ; Ishii, Katsumi</creatorcontrib><language>eng</language><creationdate>1992</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19920114&amp;DB=EPODOC&amp;CC=US&amp;NR=D323173S$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25551,76302</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=19920114&amp;DB=EPODOC&amp;CC=US&amp;NR=D323173S$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Katoh, Mitsuo</creatorcontrib><creatorcontrib>Ishii, Katsumi</creatorcontrib><title>Instrument for transferring boats for thermal treatment of semiconductor</title><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1992</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNijsOwjAMQLMwoMIdfAEGyMAB-KjMKXNlggOVGruy3fuDgAMwPem9twzthc11rsQORRRcka2Q6sAPuAm6ffWTtOL4zoT-maWAUR2y8H3OLroKi4Kj0frHJsD51B3aDU3Sk02Yicn7azrGXdzuY0rxj-UFwQk1fQ</recordid><startdate>19920114</startdate><enddate>19920114</enddate><creator>Katoh, Mitsuo</creator><creator>Ishii, Katsumi</creator><scope>EVB</scope></search><sort><creationdate>19920114</creationdate><title>Instrument for transferring boats for thermal treatment of semiconductor</title><author>Katoh, Mitsuo ; Ishii, Katsumi</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_USD323173SS3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1992</creationdate><toplevel>online_resources</toplevel><creatorcontrib>Katoh, Mitsuo</creatorcontrib><creatorcontrib>Ishii, Katsumi</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Katoh, Mitsuo</au><au>Ishii, Katsumi</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Instrument for transferring boats for thermal treatment of semiconductor</title><date>1992-01-14</date><risdate>1992</risdate><oa>free_for_read</oa></addata></record>
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title Instrument for transferring boats for thermal treatment of semiconductor
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-01-15T20%3A18%3A14IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Katoh,%20Mitsuo&rft.date=1992-01-14&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUSD323173SS%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true