Semiconductor device and method of manufacturing the same

There has been a case where peeling occurs if an internal stress of a wiring of a TFT is strong. In particular, the internal stress of a gate electrode largely influences a stress that a semiconductor film receives, and there has been a case where the internal stress becomes a cause of reduction in...

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Bibliographische Detailangaben
1. Verfasser: Arao, Tatsuya
Format: Patent
Sprache:eng
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