Apparatus and method for correlating images of a photolithographic mask
An apparatus for correlating at least two images of a photolithographic mask that at least partially overlap, in which the apparatus includes a correlation unit that is provided to use at least one random variation, which is present in the at least two images, of at least one structural element of t...
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| creator | Weber, Dieter Waiblinger, Markus |
| description | An apparatus for correlating at least two images of a photolithographic mask that at least partially overlap, in which the apparatus includes a correlation unit that is provided to use at least one random variation, which is present in the at least two images, of at least one structural element of the photolithographic mask for the correlation of the at least two images. |
| format | Patent |
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BASIC ELECTRIC ELEMENTS ; CALCULATING ; COMPUTING ; COUNTING ; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ; ELECTRICITY ; HANDLING RECORD CARRIERS ; IMAGE DATA PROCESSING OR GENERATION, IN GENERAL ; MEASURING ; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS ; OPTICS ; PHYSICS ; PRESENTATION OF DATA ; RECOGNITION OF DATA ; RECORD CARRIERS ; SCANNING-PROBE TECHNIQUES OR APPARATUS ; TESTING</subject><creationdate>2018</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180605&DB=EPODOC&CC=US&NR=9990737B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76516</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20180605&DB=EPODOC&CC=US&NR=9990737B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Weber, Dieter</creatorcontrib><creatorcontrib>Waiblinger, Markus</creatorcontrib><title>Apparatus and method for correlating images of a photolithographic mask</title><description>An apparatus for correlating at least two images of a photolithographic mask that at least partially overlap, in which the apparatus includes a correlation unit that is provided to use at least one random variation, which is present in the at least two images, of at least one structural element of the photolithographic mask for the correlation of the at least two images.</description><subject>APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM]</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CALCULATING</subject><subject>COMPUTING</subject><subject>COUNTING</subject><subject>ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS</subject><subject>ELECTRICITY</subject><subject>HANDLING RECORD CARRIERS</subject><subject>IMAGE DATA PROCESSING OR GENERATION, IN GENERAL</subject><subject>MEASURING</subject><subject>OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS</subject><subject>OPTICS</subject><subject>PHYSICS</subject><subject>PRESENTATION OF DATA</subject><subject>RECOGNITION OF DATA</subject><subject>RECORD CARRIERS</subject><subject>SCANNING-PROBE TECHNIQUES OR APPARATUS</subject><subject>TESTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2018</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNqNyjkOAjEMAMA0FAj4gz-AhNhilRIQRw_UKyvrHCKJLSf8HwoeQDXNLM31IIKK_d0A6wyFeuQZPCs4VqWMPdUAqWCgBuwBQSJ3zun7gqLE5KBge63NwmNutPm5MnA5P063LQlP1AQdVerT826t3Y3DeNwPf5QPG1Mz_g</recordid><startdate>20180605</startdate><enddate>20180605</enddate><creator>Weber, Dieter</creator><creator>Waiblinger, Markus</creator><scope>EVB</scope></search><sort><creationdate>20180605</creationdate><title>Apparatus and method for correlating images of a photolithographic mask</title><author>Weber, Dieter ; 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| subjects | APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBEMICROSCOPY [SPM] BASIC ELECTRIC ELEMENTS CALCULATING COMPUTING COUNTING ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY HANDLING RECORD CARRIERS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL MEASURING OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS SCANNING-PROBE TECHNIQUES OR APPARATUS TESTING |
| title | Apparatus and method for correlating images of a photolithographic mask |
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