Capacitive force sensor with diaphragm body having an extending free end forming a cantilever portion

A capacitive force sensor includes a base body, a diaphragm body, two spacers arranged between the base body and the diaphragm body, the two spacers supporting the diaphragm body on the base body, a free end formed by the diaphragm body projecting beyond one of the two spacers, a cavity formed betwe...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Schultheis, Thilo, Duenninger, Johannes
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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