Measurement system including a network of nanoelectromechanical system resonators

The invention relates to a measurement system including a network of nanoelectromechanical system (NEMS) resonators, characterized in that: each one of said resonators includes: an electrostatic activation device capable of generating a vibration of a beam exposed to said excitation signal, at least...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Colinet, Eric, Andreucci, Philippe, Duraffourg, Laurent, Puget, Pierre, Barattin, Régis
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRONIC CIRCUITRY ELECTRICITY IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS RESONATORS TESTING
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