Capacitive micromachined ultrasonic transducer with multiple deflectable membranes

A capacitive micromachined ultrasonic transducer (CMUT) having at least two deflectable membranes. The membranes are spaced from each other, and the membranes contribute to and/or are responsive to receive or transmit an ultrasonic signal. Spacing between the at least two deflectable membranes is ad...

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Bibliographische Detailangaben
Hauptverfasser:	Buchanan Douglas A, Emadi Tahereh Arezoo
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS DIAGNOSIS FOR PERFORMING MECHANICAL WORK IN GENERAL GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL HUMAN NECESSITIES HYGIENE IDENTIFICATION MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC ORINFRASONIC WAVES MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR MEDICAL OR VETERINARY SCIENCE METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICALVIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY PERFORMING OPERATIONS PHYSICS SURGERY TARIFF METERING APPARATUS TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	A capacitive micromachined ultrasonic transducer (CMUT) having at least two deflectable membranes. The membranes are spaced from each other, and the membranes contribute to and/or are responsive to receive or transmit an ultrasonic signal. Spacing between the at least two deflectable membranes is adjustable through application of a voltage to cause deflection of at least one of the deflectable membranes, to affect the receive/transmit properties of the CMUT.