Micromechanical spring

A micromechanical spring including at least two bar sections which, in the undeflected state of the spring, are oriented substantially parallel to one another or are at an angle of less than 45° with respect to one another, and one or more connecting sections which connect the bar sections to one an...

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Bibliographische Detailangaben
1. Verfasser: Günthner Stefan
Format: Patent
Sprache:eng
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