Conveying method and substrate processing apparatus

Provided is a method of conveying a storage container from a placing table to a conveyance place using a conveying mechanism in a substrate processing apparatus. The storage container hermetically stores a substrate and includes a flange portion formed on the top thereof. The conveying mechanism inc...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Kikuchi Hiroshi, Fujii Eiki
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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