Electrodeposition system and method incorporating an anode having a back side capacitive element

Disclosed are an electrodeposition system and method with an anode assembly comprising a capacitor comprising a first conductive plate (i.e., an anode) with a frontside having a surface exposed to a plating solution, a second conductive plate on a backside of the first conductive plate, and a dielec...

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Bibliographische Detailangaben
Hauptverfasser: Stahl Jürg, Arvin Charles L
Format: Patent
Sprache:eng
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