Substrate processing system, method of managing the same and method of manufacturing semiconductor device with the same

Provided are substrate processing systems and methods of managing the same. The method may include displaying a notification for a preventive maintenance operation on a chamber, performing a maintenance operation on the chamber, performing a first optical test, and evaluating the preventive maintena...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Lee Eunwoo, Kim Bum-Soo, Song Kiwook, Baek Kye Hyun, Tomoyasu Masayuki, Hong Jong Seo
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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