Tray and wafer holding apparatus

A tray includes a support base having both a first face on which a clamp object is placed and a second face opposite the first face, an upper electrode embedded in the support base and situated toward the first face, a lower electrode embedded in the support base and situated further toward the seco...

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Hauptverfasser:	Tamagawa Koki, Shiraiwa Norio, Yoshikawa Tadayoshi, Saito Miki, Watanabe Naoto
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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creator	Tamagawa Koki Shiraiwa Norio Yoshikawa Tadayoshi Saito Miki Watanabe Naoto
description	A tray includes a support base having both a first face on which a clamp object is placed and a second face opposite the first face, an upper electrode embedded in the support base and situated toward the first face, a lower electrode embedded in the support base and situated further toward the second face than the upper electrode is, and one or more interconnect lines configured to provide an electrical connection between the upper electrode and the lower electrode.
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title	Tray and wafer holding apparatus
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