Methods of transferring device wafers or layers between carrier substrates and other surfaces

New temporary bonding methods and articles formed from those methods are provided. In one embodiment, the methods comprise coating a device or other ultrathin layer on a growth substrate with a rigid support layer and then bonding that stack to a carrier substrate. The growth substrate can then be r...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: McCutcheon Jeremy, Flaim Tony D, Bailey Susan
Format: Patent
Sprache:eng
Schlagworte:
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