Semiconductor device with floating field plates

A semiconductor device with a current terminal region located in a device active area of a substrate of the device. A guard region is located in a termination area of the device. A plurality of floating field plates are located in the termination area and are ohmically coupled to the guard region. T...

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Hauptverfasser: Gao Zihao M, Rueda Hernan A, Burdeaux David C, Burger Wayne Robert, Dragon Christopher P
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creator Gao Zihao M
Rueda Hernan A
Burdeaux David C
Burger Wayne Robert
Dragon Christopher P
description A semiconductor device with a current terminal region located in a device active area of a substrate of the device. A guard region is located in a termination area of the device. A plurality of floating field plates are located in the termination area and are ohmically coupled to the guard region. The floating field plates and guard region act in some embodiments to "smooth" the electrical field distribution along the termination area.
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
title Semiconductor device with floating field plates
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