Laser system and method thereof

A laser system includes a laser configured to emit pulse bursts and a motion device in optical communication with the laser. The motion device moves a laser beam along a process path on a substrate and is configured to have a natural frequency that is greater than an operating frequency of the laser...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Olesen Niels A, Bareman Donald L, Bender David A
Format: Patent
Sprache:eng
Schlagworte:
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