Semiconductor structure with oxide semiconductor layer

The present invention provides a semiconductor structure, including a base, a patterned oxide semiconductor (OS) layer, two source/drain regions, a protective layer, a gate layer and a gate dielectric layer. The patterned OS layer is disposed on the base. Two source/drain regions are disposed on the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Wu Chun-Yuan, Hsu Chia-Fu
Format: Patent
Sprache:eng
Schlagworte:
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