Semiconductor device, method for manufacturing the same, and rinsing liquid

A method for manufacturing a semiconductor device including: a process of applying a sealing composition for a semiconductor to a semiconductor substrate, to form a sealing layer for a semiconductor on at least the bottom face and the side face of a recess portion of an interlayer insulating layer,...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kohmura Kazuo, Suzuki Tsuneji, Ono Shoko, Kayaba Yasuhisa, Tanaka Hirofumi
Format: Patent
Sprache:eng
Schlagworte:
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