Method for treating a semiconductor wafer

A Magnetic Czochralski semiconductor wafer having opposing first and second sides arranged distant from one another in a first vertical direction is treated by implanting first particles into the semiconductor wafer via the second side to form crystal defects in the semiconductor wafer. The crystal...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Laven Johannes, Voss Stephan, Oefner Helmut, Susiti Alexander, Liu Shuhai, Breymesser Alexander, Schulze Hans-Joachim
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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