Substrate table system, lithographic apparatus and substrate table swapping method
A substrate table system includes a substrate table and a dual directional motor for moving the substrate table in a plane of movement that is defined by a first direction and a second direction. The dual directional motor includes: a first pusher structure extending in the first direction, the subs...
Gespeichert in:
| Hauptverfasser: | , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | Hoogendam Christiaan Alexander Loopstra Erik Roelof De Groot Antonius Franciscus Johannes Van De Ven Bastiaan Lambertus Wilhelmus Marinus Butler Hans |
| description | A substrate table system includes a substrate table and a dual directional motor for moving the substrate table in a plane of movement that is defined by a first direction and a second direction. The dual directional motor includes: a first pusher structure extending in the first direction, the substrate table being movable in respect of the first pusher structure, the first pusher structure and the substrate table being arranged to cooperate to form a first motor to exert a force between the first pusher structure and the substrate table in the first direction; and a second pusher structure extending in the first direction, the substrate table being movable in respect of the second pusher structure, the second pusher structure and the substrate table to cooperate to form a second motor to exert a force between the second pusher structure and the substrate table in the second direction. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_US9753381B2</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>US9753381B2</sourcerecordid><originalsourceid>FETCH-epo_espacenet_US9753381B23</originalsourceid><addsrcrecordid>eNrjZAgKLk0qLilKLElVKElMyklVKK4sLknN1VHIySzJyE8vSizIyExWSCwoSASqKS1WSMxLUShG11IOlM_MS1fITQXqSeFhYE1LzClO5YXS3AwKbq4hzh66qQX58anFBYnJqXmpJfGhwZbmpsbGFoZORsZEKAEADKg4mg</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Substrate table system, lithographic apparatus and substrate table swapping method</title><source>esp@cenet</source><creator>Hoogendam Christiaan Alexander ; Loopstra Erik Roelof ; De Groot Antonius Franciscus Johannes ; Van De Ven Bastiaan Lambertus Wilhelmus Marinus ; Butler Hans</creator><creatorcontrib>Hoogendam Christiaan Alexander ; Loopstra Erik Roelof ; De Groot Antonius Franciscus Johannes ; Van De Ven Bastiaan Lambertus Wilhelmus Marinus ; Butler Hans</creatorcontrib><description>A substrate table system includes a substrate table and a dual directional motor for moving the substrate table in a plane of movement that is defined by a first direction and a second direction. The dual directional motor includes: a first pusher structure extending in the first direction, the substrate table being movable in respect of the first pusher structure, the first pusher structure and the substrate table being arranged to cooperate to form a first motor to exert a force between the first pusher structure and the substrate table in the first direction; and a second pusher structure extending in the first direction, the substrate table being movable in respect of the second pusher structure, the second pusher structure and the substrate table to cooperate to form a second motor to exert a force between the second pusher structure and the substrate table in the second direction.</description><language>eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CINEMATOGRAPHY ; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER ; DYNAMO-ELECTRIC MACHINES ; ELECTRICITY ; ELECTROGRAPHY ; GENERATION ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>2017</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170905&DB=EPODOC&CC=US&NR=9753381B2$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25542,76289</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20170905&DB=EPODOC&CC=US&NR=9753381B2$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Hoogendam Christiaan Alexander</creatorcontrib><creatorcontrib>Loopstra Erik Roelof</creatorcontrib><creatorcontrib>De Groot Antonius Franciscus Johannes</creatorcontrib><creatorcontrib>Van De Ven Bastiaan Lambertus Wilhelmus Marinus</creatorcontrib><creatorcontrib>Butler Hans</creatorcontrib><title>Substrate table system, lithographic apparatus and substrate table swapping method</title><description>A substrate table system includes a substrate table and a dual directional motor for moving the substrate table in a plane of movement that is defined by a first direction and a second direction. The dual directional motor includes: a first pusher structure extending in the first direction, the substrate table being movable in respect of the first pusher structure, the first pusher structure and the substrate table being arranged to cooperate to form a first motor to exert a force between the first pusher structure and the substrate table in the first direction; and a second pusher structure extending in the first direction, the substrate table being movable in respect of the second pusher structure, the second pusher structure and the substrate table to cooperate to form a second motor to exert a force between the second pusher structure and the substrate table in the second direction.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CINEMATOGRAPHY</subject><subject>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</subject><subject>DYNAMO-ELECTRIC MACHINES</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>GENERATION</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2017</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZAgKLk0qLilKLElVKElMyklVKK4sLknN1VHIySzJyE8vSizIyExWSCwoSASqKS1WSMxLUShG11IOlM_MS1fITQXqSeFhYE1LzClO5YXS3AwKbq4hzh66qQX58anFBYnJqXmpJfGhwZbmpsbGFoZORsZEKAEADKg4mg</recordid><startdate>20170905</startdate><enddate>20170905</enddate><creator>Hoogendam Christiaan Alexander</creator><creator>Loopstra Erik Roelof</creator><creator>De Groot Antonius Franciscus Johannes</creator><creator>Van De Ven Bastiaan Lambertus Wilhelmus Marinus</creator><creator>Butler Hans</creator><scope>EVB</scope></search><sort><creationdate>20170905</creationdate><title>Substrate table system, lithographic apparatus and substrate table swapping method</title><author>Hoogendam Christiaan Alexander ; Loopstra Erik Roelof ; De Groot Antonius Franciscus Johannes ; Van De Ven Bastiaan Lambertus Wilhelmus Marinus ; Butler Hans</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_US9753381B23</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2017</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CINEMATOGRAPHY</topic><topic>CONVERSION OR DISTRIBUTION OF ELECTRIC POWER</topic><topic>DYNAMO-ELECTRIC MACHINES</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>GENERATION</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>Hoogendam Christiaan Alexander</creatorcontrib><creatorcontrib>Loopstra Erik Roelof</creatorcontrib><creatorcontrib>De Groot Antonius Franciscus Johannes</creatorcontrib><creatorcontrib>Van De Ven Bastiaan Lambertus Wilhelmus Marinus</creatorcontrib><creatorcontrib>Butler Hans</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Hoogendam Christiaan Alexander</au><au>Loopstra Erik Roelof</au><au>De Groot Antonius Franciscus Johannes</au><au>Van De Ven Bastiaan Lambertus Wilhelmus Marinus</au><au>Butler Hans</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Substrate table system, lithographic apparatus and substrate table swapping method</title><date>2017-09-05</date><risdate>2017</risdate><abstract>A substrate table system includes a substrate table and a dual directional motor for moving the substrate table in a plane of movement that is defined by a first direction and a second direction. The dual directional motor includes: a first pusher structure extending in the first direction, the substrate table being movable in respect of the first pusher structure, the first pusher structure and the substrate table being arranged to cooperate to form a first motor to exert a force between the first pusher structure and the substrate table in the first direction; and a second pusher structure extending in the first direction, the substrate table being movable in respect of the second pusher structure, the second pusher structure and the substrate table to cooperate to form a second motor to exert a force between the second pusher structure and the substrate table in the second direction.</abstract><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_US9753381B2 |
| source | esp@cenet |
| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CINEMATOGRAPHY CONVERSION OR DISTRIBUTION OF ELECTRIC POWER DYNAMO-ELECTRIC MACHINES ELECTRICITY ELECTROGRAPHY GENERATION HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | Substrate table system, lithographic apparatus and substrate table swapping method |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-12T18%3A14%3A21IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=Hoogendam%20Christiaan%20Alexander&rft.date=2017-09-05&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EUS9753381B2%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |